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Ultrathin calcium titanate capacitors : physics and application / / Andreas Krause



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Autore: Krause Andreas Visualizza persona
Titolo: Ultrathin calcium titanate capacitors : physics and application / / Andreas Krause Visualizza cluster
Pubblicazione: Berlin : , : Logos, , [2014]
©2014
Descrizione fisica: 1 online resource (149 pages)
Disciplina: 621.38195833
Soggetto topico: Semiconductor storage devices
Dynamic random access memory
Note generali: PublicationDate: 20140704
Sommario/riassunto: Long description: To enable further scaling for future generations of DRAM capacitors, significant efforts to replace Zirconium dioxide as high-k dielectric have been undertaken since the 1990s. In calculations, Calcium titanate has been identified as a potential replacement to allow a significant capacitance improvement. This material exhibits a significantly higher permittivity and a sufficient band gap. The scope of this thesis is therefore the preparation and detailed physical and electrical characterization of ultrathin Calcium titanate layers. The complete capacitor stacks including Calcium titanate have been prepared under ultrahigh vacuum to minimize the influence of adsorbents or contaminants at the interfaces. Various electrodes are evaluated regarding temperature stability and chemical reactance to achieve crystalline Calcium titanate. An optimal electrode was found to be a stack consisting of Pt on TiN. Additionally, this thesis presents fundamental results on the creation, physical and electrical characterization of Calcium titanate nanocrystallites embedded in an amorphous matrix. Capacitors with these nanocrystallites exhibit an increased permittivity of 55 with low leakage currents comparable to currents in amorphous layers.
Titolo autorizzato: Ultrathin calcium titanate capacitors  Visualizza cluster
ISBN: 3-8325-9361-6
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910815107603321
Lo trovi qui: Univ. Federico II
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