LEADER 02542nam 2200433 450 001 9910815107603321 005 20230803211644.0 010 $a3-8325-9361-6 035 $a(CKB)4340000000244383 035 $a(MiAaPQ)EBC5247133 035 $a58a1c68b-8adc-45f4-a160-3edeb0dd2d03 035 $a(EXLCZ)994340000000244383 100 $a20180521d2014 uy 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aUltrathin calcium titanate capacitors $ephysics and application /$fAndreas Krause 210 1$aBerlin :$cLogos,$d[2014] 210 4$dİ2014 215 $a1 online resource (149 pages) 225 0 $aResearch at NaMLab ;$vBand 3 300 $aPublicationDate: 20140704 311 $a3-8325-3724-4 330 $aLong description: To enable further scaling for future generations of DRAM capacitors, significant efforts to replace Zirconium dioxide as high-k dielectric have been undertaken since the 1990s. In calculations, Calcium titanate has been identified as a potential replacement to allow a significant capacitance improvement. This material exhibits a significantly higher permittivity and a sufficient band gap. The scope of this thesis is therefore the preparation and detailed physical and electrical characterization of ultrathin Calcium titanate layers. The complete capacitor stacks including Calcium titanate have been prepared under ultrahigh vacuum to minimize the influence of adsorbents or contaminants at the interfaces. Various electrodes are evaluated regarding temperature stability and chemical reactance to achieve crystalline Calcium titanate. An optimal electrode was found to be a stack consisting of Pt on TiN. Additionally, this thesis presents fundamental results on the creation, physical and electrical characterization of Calcium titanate nanocrystallites embedded in an amorphous matrix. Capacitors with these nanocrystallites exhibit an increased permittivity of 55 with low leakage currents comparable to currents in amorphous layers. 606 $aSemiconductor storage devices 606 $aDynamic random access memory 615 0$aSemiconductor storage devices. 615 0$aDynamic random access memory. 676 $a621.38195833 700 $aKrause$b Andreas$0133101 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910815107603321 996 $aUltrathin calcium titanate capacitors$93999786 997 $aUNINA