A guide to hands-on MEMS design and prototyping / / Joel Kubby [[electronic resource]]
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| Autore: |
Kubby Joel A.
|
| Titolo: |
A guide to hands-on MEMS design and prototyping / / Joel Kubby [[electronic resource]]
|
| Pubblicazione: | Cambridge : , : Cambridge University Press, , 2011 |
| Descrizione fisica: | 1 online resource (xi, 166 pages) : digital, PDF file(s) |
| Disciplina: | 621.381 |
| Soggetto topico: | Microelectromechanical systems |
| Classificazione: | TEC008080 |
| Note generali: | Title from publisher's bibliographic system (viewed on 05 Oct 2015). |
| Nota di bibliografia: | Includes bibliographical references and index. |
| Nota di contenuto: | Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics. |
| Sommario/riassunto: | Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online. |
| Altri titoli varianti: | A Guide to Hands-on MEMS Design & Prototyping |
| Titolo autorizzato: | A guide to hands-on MEMS design and prototyping |
| ISBN: | 1-139-12411-0 |
| 1-107-21936-1 | |
| 1-283-29560-1 | |
| 1-139-12216-9 | |
| 9786613295606 | |
| 1-139-11642-8 | |
| 1-139-11206-6 | |
| 0-511-98466-9 | |
| 1-139-12708-X | |
| 1-139-11425-5 | |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910817976103321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |