03130nam 22006852 450 991081797610332120160223141449.01-139-12411-01-107-21936-11-283-29560-11-139-12216-997866132956061-139-11642-81-139-11206-60-511-98466-91-139-12708-X1-139-11425-5(CKB)2550000000055632(EBL)775091(OCoLC)769341803(SSID)ssj0000537325(PQKBManifestationID)11352574(PQKBTitleCode)TC0000537325(PQKBWorkID)10553658(PQKB)10627471(UkCbUP)CR9780511984662(MiAaPQ)EBC775091(Au-PeEL)EBL775091(CaPaEBR)ebr10502663(CaONFJC)MIL329560(OCoLC)759114739(PPN)261317326(EXLCZ)99255000000005563220101130d2011|||| uy| 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierA guide to hands-on MEMS design and prototyping /Joel Kubby[electronic resource]Cambridge :Cambridge University Press,2011.1 online resource (xi, 166 pages) digital, PDF file(s)Title from publisher's bibliographic system (viewed on 05 Oct 2015).1-107-64579-4 0-521-88925-1 Includes bibliographical references and index.Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.A Guide to Hands-on MEMS Design & PrototypingMicroelectromechanical systemsMicroelectromechanical systems.621.381TEC008080bisacshKubby Joel A.979138UkCbUPUkCbUPBOOK9910817976103321A guide to hands-on MEMS design and prototyping4112851UNINA