Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
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| Titolo: |
Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
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| Pubblicazione: | [Place of publication not identified], : Japan Society of Applied Physics, 2004 |
| Disciplina: | 621.3815/31 |
| Soggetto topico: | Microfabrication - Very large scale integration - Design and construction |
| Integrated circuits | |
| Lithography | |
| Nanotechnology | |
| Microelectronics | |
| Physics | |
| Physical Sciences & Mathematics | |
| Atomic Physics | |
| Note generali: | Bibliographic Level Mode of Issuance: Monograph |
| Titolo autorizzato: | Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910872557103321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |