Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan

• Record Nr.: UNINA9910872557103321
• Pubbl/distr/stampa: [Place of publication not identified], : Japan Society of Applied Physics, 2004
• Disciplina: 621.3815/31
• Soggetti: Microfabrication - Very large scale integration - Design and construction; Integrated circuits; Lithography; Nanotechnology; Microelectronics; Physics; Physical Sciences & Mathematics; Atomic Physics
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: Bibliographic Level Mode of Issuance: Monograph