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Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan



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Titolo: Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan Visualizza cluster
Pubblicazione: [Place of publication not identified], : Japan Society of Applied Physics, 2004
Disciplina: 621.3815/31
Soggetto topico: Microfabrication - Very large scale integration - Design and construction
Integrated circuits
Lithography
Nanotechnology
Microelectronics
Physics
Physical Sciences & Mathematics
Atomic Physics
Note generali: Bibliographic Level Mode of Issuance: Monograph
Titolo autorizzato: Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan  Visualizza cluster
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910872557103321
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