10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada
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| Titolo: |
10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada
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| Pubblicazione: | [Place of publication not identified], : IEEE, 2002 |
| Soggetto topico: | Semiconductors - Heat treatment |
| Rapid thermal processing - Defects | |
| Semiconductor doping | |
| Semiconductors | |
| Electrical Engineering | |
| Electrical & Computer Engineering | |
| Engineering & Applied Sciences | |
| Persona (resp. second.): | GelpeyJeffrey C |
| Note generali: | Bibliographic Level Mode of Issuance: Monograph |
| Titolo autorizzato: | 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910873050203321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |