01970oam 2200517zu 450 991087305020332120241212215148.0(CKB)111055184256742(SSID)ssj0000393514(PQKBManifestationID)12111399(PQKBTitleCode)TC0000393514(PQKBWorkID)10363643(PQKB)10074158(EXLCZ)9911105518425674220160829d2002 uy engtxtccr10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada[Place of publication not identified]IEEE2002Bibliographic Level Mode of Issuance: Monograph9780780374652 0780374657 SemiconductorsHeat treatmentCongressesRapid thermal processingDefectsCongressesSemiconductor dopingCongressesSemiconductorsCongressesElectrical EngineeringHILCCElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCSemiconductorsHeat treatmentRapid thermal processingDefectsSemiconductor dopingSemiconductorsElectrical EngineeringElectrical & Computer EngineeringEngineering & Applied SciencesGelpey Jeffrey C.IEEE Electron Devices Society,International Conference on Advanced Thermal Processing of Semiconductors.PQKBPROCEEDING991087305020332110th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada2500993UNINA