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The Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany
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The Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany
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2500896
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