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Formation of silicon nitride from the 19th to the 21st century : a comprehensive summary and guide to the world literature / / Raymond C. Sangster ; updated and revised by David J. Fisher



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Autore: Sangster Raymond C. Visualizza persona
Titolo: Formation of silicon nitride from the 19th to the 21st century : a comprehensive summary and guide to the world literature / / Raymond C. Sangster ; updated and revised by David J. Fisher Visualizza cluster
Pubblicazione: [Pfäffikon], Switzerland : , : Trans Tech Publications Ltd, , 2015
©2015
Edizione: Second edition, revised and updated.
Descrizione fisica: 1 online resource (1001 p.)
Disciplina: 666
Soggetto topico: Silicon nitride
Persona (resp. second.): FisherDavid J.
Note generali: Description based upon print version of record.
Nota di bibliografia: Includes bibliographical references at the end of each chapters.
Nota di contenuto: Formation of Silicon Nitride from the 19th to the 21st Century; Preface; Table of Contents; Part A: In the Beginning; Part B: Technical Context of Silicon Nitride Formation; Part C: Si3N4 Products, Uses and Markets; Part D: Si3N4 by Reaction of Si(cr) Surfaces and N-Species; Part E: Si3N4 Powder Formation from Si(Powder)/N2(g); Part F: Fabrication of Reaction Bonded Silicon Nitride; Part G: Si3N4 from Si/N2 under Vigorous Conditions; Part H: Si3N4 Formation by Reaction of Si with N-Compounds; Part Í: Si3N4 by Nitridation of Si-O Based Materials
Part J: Si3N4 Formation from Si-N Based MaterialsPart K: Comparative Overview and Summary of Si3N4 CVD; Part L: Si3N4 by CVD Nitridation of Si-H Compounds; Part M: Si3N4 by CVD Nitridation of Si Halides and Halosilanes; Part N: Si3N4 Formation in Si-C-N Systems; Part O: Si3N4 Formation in Si-N-X Systems, X = B, P, S, Fe, other
Sommario/riassunto: The elements: Si, N, O, C and H, have strong chemical affinities for one another. Under the correct conditions, Si-N bonding will occur in almost any Si-N-(O/C/H), and many related, reaction systems; although Si-O and Si-C are formidable competitors to Si-N. The most favored Si-N compound is stoichiometric Si3N4. It comes in three common varieties. How they interrelate, how one finds them and (above all ) how one makes them - and how sometimes they just happen to form - are the subjects of this book, with due attention being paid to closely related matters. This revised second edition summariz
Titolo autorizzato: Formation of silicon nitride from the 19th to the 21st century  Visualizza cluster
ISBN: 3-03826-901-8
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910810977803321
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Serie: Materials science foundations ; ; Volumes 84-85.