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Novel optical technologies for nanofabrication / / Qian Liu, Xuanming Duan, Changsi Peng



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Autore: Liu Qian Visualizza persona
Titolo: Novel optical technologies for nanofabrication / / Qian Liu, Xuanming Duan, Changsi Peng Visualizza cluster
Pubblicazione: Heidelberg [Germany] : , : Springer, , 2014
Edizione: 1st ed. 2014.
Descrizione fisica: 1 online resource (ix, 267 pages) : illustrations (some color)
Disciplina: 274
Soggetto topico: Nanomanufacturing
Nanostructured materials
Lasers - Industrial applications
Persona (resp. second.): DuanXuanming
PengChangsi
Note generali: "ISSN: 1571-5744."
Nota di bibliografia: Includes bibliographical references.
Nota di contenuto: Introduction -- Super-resolution Laser Direct Writing and Its Applications -- Laser path-guided wrinkle structures -- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process -- Laser Interference Nano-Fabrication -- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons -- Mass production of large-format micro/nano-structure based optical devices.
Sommario/riassunto: Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new  techniques and methods as well as applications and development trends  in laser nanofabrication, including super-resolution laser direct writing,  surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on  two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.
Titolo autorizzato: Novel Optical Technologies for Nanofabrication  Visualizza cluster
ISBN: 3-642-40387-5
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910298638803321
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Serie: Nanostructure science and technology.