Development of CMOS-MEMS/NEMS Devices |
Autore | Verd Jaume |
Pubbl/distr/stampa | MDPI - Multidisciplinary Digital Publishing Institute, 2019 |
Descrizione fisica | 1 electronic resource (165 p.) |
Soggetto non controllato |
encapsulation
NEM memory switch magnetotransistor gas sensor nano-system array metal oxide (MOX) sensor capacitive pressure sensor real-time temperature compensation loop mechanical relays single-crystal silicon (SC-Si) MEMS relays MEMS oscillator micro-electro-mechanical system (MEMS) uncooled IR-bolometer microelectromechanical systems microbolometer programmable sustaining amplifier micro sensor CMOS-MEMS pierce oscillator MEMS resonators micro/nanoelectromechanical systems (MEMS/NEMS) resonator microhotplate NEMS application-specific integrated circuit (ASIC) MEMS modelling magnetic field chopper instrumentation amplifier microresonators interface circuit Hall effect thermal detector temperature sensor infrared sensor CMOS-NEMS CMOS atomic force microscope MEMS switches stent micro-electro-mechanical systems (MEMS) sensors nano resonator silicon-on-insulator (SOI) MEMS-ASIC integration Sigma-Delta MEMS characterization high-Q capacitive accelerometer mass sensors M3D |
ISBN | 3-03921-069-6 |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNINA-9910346840003321 |
Verd Jaume | ||
MDPI - Multidisciplinary Digital Publishing Institute, 2019 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
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Silicon Photonics Bloom |
Autore | Boyraz Ozdal |
Pubbl/distr/stampa | Basel, Switzerland, : MDPI - Multidisciplinary Digital Publishing Institute, 2020 |
Descrizione fisica | 1 electronic resource (184 p.) |
Soggetto topico | History of engineering & technology |
Soggetto non controllato |
quantum dot
silicon nanocrystals light emitting diode vertical grating coupler WDM transmitter optical interconnects silicon photonics silicon optical modulator Silicon Photonics off-chip coupling polarisation controller integrated polarimeter polarisation multiplexing polarisation shift keying germanium integrated optics optoelectronics photoconductivity terahertz frequency combs heterogeneous integration second-harmonic generation supercontinuum integrated photonics mode-locked lasers nonlinear optics microelectromechanical systems (MEMS) electrostatic actuator parallel plate actuation optical switch silicon-on-insulator (SOI) micro-platform optical waveguide silicon nitride photonics phase change material integrated silicon photonic circuits nanophononics modulator multimode interferometer photonics integrated circuit carrier plasma Mach-Zehnder interferometers silicon oxynitride thin film photoluminescence chemical vapor deposition physical vapor deposition dispersion control Bragg gratings photonic processors unitary transformation amorphous silicon oxycarbide nitrogen doping defect plasma enhanced chemical vapor deposition |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNINA-9910557287403321 |
Boyraz Ozdal | ||
Basel, Switzerland, : MDPI - Multidisciplinary Digital Publishing Institute, 2020 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
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