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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
| Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| Autore | Taudt Christopher |
| Edizione | [1st ed.] |
| Pubbl/distr/stampa | Wiesbaden, : Springer Fachmedien Wiesbaden GmbH, 2021 |
| Descrizione fisica | 1 online resource (180 p.) |
| Soggetto topico |
Optical physics
Mensuration & systems of measurement |
| Soggetto non controllato |
surface metrology
profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access |
| ISBN |
9783658359263
3658359269 |
| Classificazione | SCI053000TEC022000 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Intro -- Acknowledgements -- Abstract -- Contents -- List of Symbols -- List of Figures -- List of Tables -- 1 Introduction and Motivation -- 2 Related Works and Basic Considerations -- 2.1 Profilometry -- 2.1.1 Atomic Force Microscopy -- 2.1.2 Confocal Laser Scanning Microscopy -- 2.1.3 Digital Holographic Microscopy -- 2.1.4 Phase-shifting Interferometry -- 2.1.5 Coherence Scanning Interferometry -- 2.1.6 Low-coherence Interferometry -- 2.2 Polymer Cross-linking Characterization -- 2.2.1 Soxhlet-type Extraction -- 2.2.2 Differential Scanning Caliometry -- 2.2.3 Dynamic Mechanical Analysis -- 2.2.4 Spectroscopy-based Methods -- 2.2.5 Low-coherence Interferometry and Other Optical Methods -- 2.2.6 Spatially-resolved Approaches -- 2.3 Film Thickness Measurement -- 2.3.1 Spectral Reflectometry -- 2.3.2 Spectroscopic Ellipsometry -- 2.4 Material dispersion -- 2.4.1 Thermo-optic coefficient -- 2.4.2 Photo-elastic influences -- 2.4.3 Characterization of dispersion -- 3 Surface Profilometry -- 3.1 Experimental Setup -- 3.2 Measurement Range and Resolution -- 3.3 Signal Formation and Analysis -- 3.3.1 Fitting of Oscillating Data -- 3.3.2 Frequency Analysis -- 3.3.3 Two-Stage Fitting -- 3.3.4 Error Estimation of the Data Processing -- 3.4 Two-Dimensional Approach and Characterization -- 3.4.1 Height Standard Evaluation -- 3.4.2 Repeatability and Resolution Characterization -- 3.4.3 Edge Effects -- 3.4.4 Roughness Evaluation -- 3.4.5 High-Dynamic Range Measurements -- 3.4.6 Dual-Channel Approach -- 3.5 Areal Measurement Approaches -- 3.5.1 Translation-Based Areal Information -- 3.5.2 Alternative Spectral Encoding for Areal Measurements -- 4 Polymer Characterization -- 4.1 Temporal Approach -- 4.2 Scan-free Approach -- 4.2.1 Wrapped-phase Derivative Evaluation (WPDE) -- 4.2.2 Spatially-resolved Approaches -- 4.3 Influences and Limitations.
4.3.1 Error Parameters of the Temporal Approach -- 4.3.2 Error Propagation in WPDE -- 5 Thin-film Characterization -- 5.1 Setup Considerations -- 5.2 Characterization of Thin-films on Bulk Substrates -- 5.3 Characterization of Flexible Substrate Materials -- 6 Conclusion -- A Glossary -- Publications -- Bibliography. |
| Record Nr. | UNINA-9910510584003321 |
Taudt Christopher
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| Wiesbaden, : Springer Fachmedien Wiesbaden GmbH, 2021 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical coherence tomography for characterization of nanocomposite materials
| Optical coherence tomography for characterization of nanocomposite materials |
| Pubbl/distr/stampa | Karlsruhe, : KIT Scientific Publishing, 2021 |
| Descrizione fisica | 1 online resource (208 p.) |
| Collana | Karlsruhe Series in Photonics & Communications |
| Soggetto topico | Electrical engineering |
| Soggetto non controllato |
nanocomposite materials
nanoparticles Nanopartikel Nanoverbundmaterialien optical coherence tomography optical metrology Optische Kohärenztomographie Optische Messtechnik silicon photonics Siliziumphotonik |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910805672703321 |
| Karlsruhe, : KIT Scientific Publishing, 2021 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical In-Process Measurement Systems
| Optical In-Process Measurement Systems |
| Autore | Fischer Andreas |
| Pubbl/distr/stampa | Basel, : MDPI - Multidisciplinary Digital Publishing Institute, 2022 |
| Descrizione fisica | 1 online resource (194 p.) |
| Soggetto topico |
History of engineering & technology
Technology: general issues |
| Soggetto non controllato |
additive manufacturing
bistatic coal dust coherence function coherence scanning interferometry computational shear interferometry deep rolling process diffraction equation diffraction grating dilated convolution Doppler lidar dual-aperture common-path interferometer electrical steel explosion explosion pressure explosion suppression fast prediction time free radicals fringe projection gas mixing modeling generalized phase shifting interferometry grating pitch hairpin image processing in situ measurement in-process application in-process measurement interferometric distance sensor interferometry laser diffraction laser material processing laser welding LCI low coherence interferometry measurement uncertainty analysis medium voltage switchgear meteorology methane metrology Mirau interferometer mode-locked femtosecond laser multicomponent diffusion analysis n/a OCT optical coherence tomography optical metrology optical path length modulation optomechatronic systems oscillating reference mirror pattern recognition process monitoring quality assurance quality control radiation intensity real-time optical instrumentation scanning sdu-net semantic segmentation SF6 alternatives spatter detection speckle photography spectral characteristics spot compensation structure function traceability turbulence wedges UV-Vis spectroscopy vibration compensation wind energy wind energy turbines wind lidar |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910576878403321 |
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Fischer Andreas
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| Basel, : MDPI - Multidisciplinary Digital Publishing Institute, 2022 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Structural, Magnetic, Dielectric, Electrical, Optical and Thermal Properties of Nanocrystalline Materials: Synthesis, Characterization and Application
| Structural, Magnetic, Dielectric, Electrical, Optical and Thermal Properties of Nanocrystalline Materials: Synthesis, Characterization and Application |
| Autore | Yadav Raghvendra Singh |
| Pubbl/distr/stampa | Basel, : MDPI - Multidisciplinary Digital Publishing Institute, 2022 |
| Descrizione fisica | 1 online resource (197 p.) |
| Soggetto topico | Technology: general issues |
| Soggetto non controllato |
2D material
Ag@Au nanoparticle analytical solution Au-ZnO/C2H6O2 beryllium oxide chemical vapor transport core-shell structure crystal growth dielectric constants dielectric properties electromagnetic electronic materials ellipsometry entropy generation error analysis Fano resonances fentanyl glucose graphene quantum dots heat transfer high-accuracy measurement hybrid nanofluid lithium Niobate low dimensional magnetism magnetic chains metamaterials MHD mixed convection nanocrystalline cellulose nanoparticle nucleation non-linear radiation optical optical metrology photocatalytic activity porous media powder X-ray diffraction radiation effect rietveld refinement rotating systems SAW devices sea-urchin-like structure sensing SERS shooting method similarity solution slender body revolution sparking process spectroscopy SQUID stability analysis surface energy surface plasmon resonance thin film three-stage Lobatto III-A formula time-dependent flow transition metal phosphorus sulfide triple solutions van der Waals layered material vapor deposition α-Fe2O3 γ-alumina nanoparticle |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Altri titoli varianti | Structural, Magnetic, Dielectric, Electrical, Optical and Thermal Properties of Nanocrystalline Materials |
| Record Nr. | UNINA-9910557621303321 |
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Yadav Raghvendra Singh
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| Basel, : MDPI - Multidisciplinary Digital Publishing Institute, 2022 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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