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Development of CMOS-MEMS/NEMS Devices
| Development of CMOS-MEMS/NEMS Devices |
| Autore | Verd Jaume |
| Pubbl/distr/stampa | MDPI - Multidisciplinary Digital Publishing Institute, 2019 |
| Descrizione fisica | 1 electronic resource (165 p.) |
| Soggetto non controllato |
encapsulation
NEM memory switch magnetotransistor gas sensor nano-system array metal oxide (MOX) sensor capacitive pressure sensor real-time temperature compensation loop mechanical relays single-crystal silicon (SC-Si) MEMS relays MEMS oscillator micro-electro-mechanical system (MEMS) uncooled IR-bolometer microelectromechanical systems microbolometer programmable sustaining amplifier micro sensor CMOS-MEMS pierce oscillator MEMS resonators micro/nanoelectromechanical systems (MEMS/NEMS) resonator microhotplate NEMS application-specific integrated circuit (ASIC) MEMS modelling magnetic field chopper instrumentation amplifier microresonators interface circuit Hall effect thermal detector temperature sensor infrared sensor CMOS-NEMS CMOS atomic force microscope MEMS switches stent micro-electro-mechanical systems (MEMS) sensors nano resonator silicon-on-insulator (SOI) MEMS-ASIC integration Sigma-Delta MEMS characterization high-Q capacitive accelerometer mass sensors M3D |
| ISBN | 3-03921-069-6 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910346840003321 |
Verd Jaume
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| MDPI - Multidisciplinary Digital Publishing Institute, 2019 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Micromanipulation
| Micromanipulation |
| Autore | Nicola Pio Belfiore (Ed.) |
| Pubbl/distr/stampa | MDPI - Multidisciplinary Digital Publishing Institute, 2018 |
| Descrizione fisica | 1 electronic resource (200 p.) |
| Soggetto non controllato |
Microsystems
Control Dynamics Kinematics NEMS Microactuators MEMS Micromanipulation Microgrippers |
| ISBN | 3-03897-504-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910346858003321 |
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Nicola Pio Belfiore (Ed.)
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| MDPI - Multidisciplinary Digital Publishing Institute, 2018 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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