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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets : Doctoral Thesis accepted by The Complutense University of Madrid, Spain / María Ángela Pampillón Arce
| Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets : Doctoral Thesis accepted by The Complutense University of Madrid, Spain / María Ángela Pampillón Arce |
| Autore | Pampillón Arce, María Á. |
| Pubbl/distr/stampa | Cham, : Springer, 2017 |
| Descrizione fisica | xxiii, 164 p. : ill. ; 24 cm |
| Soggetto topico |
00A79 (77-XX) - Physics [MSC 2020]
74K35 - Thin films [MSC 2020] 74A50 - Structured surfaces and interfaces, coexistent phases [MSC 2020] |
| Soggetto non controllato |
Gadolinium Oxide
Gadolinium Scandate High Permittivity Dielectrics High Pressure Sputtering InP Substrates MIS Devices MOSFET Plasma Oxidation Scandium Oxide Scavenging Effect |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Titolo uniforme | |
| Record Nr. | UNICAMPANIA-VAN0187568 |
Pampillón Arce, María Á.
|
||
| Cham, : Springer, 2017 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Vanvitelli | ||
| ||
Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets : Doctoral Thesis accepted by The Complutense University of Madrid, Spain / María Ángela Pampillón Arce
| Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets : Doctoral Thesis accepted by The Complutense University of Madrid, Spain / María Ángela Pampillón Arce |
| Autore | Pampillón Arce, María Á. |
| Pubbl/distr/stampa | Cham, : Springer, 2017 |
| Descrizione fisica | xxiii, 164 p. : ill. ; 24 cm |
| Soggetto topico |
00A79 (77-XX) - Physics [MSC 2020]
74A50 - Structured surfaces and interfaces, coexistent phases [MSC 2020] 74K35 - Thin films [MSC 2020] |
| Soggetto non controllato |
Gadolinium Oxide
Gadolinium Scandate High Permittivity Dielectrics High Pressure Sputtering InP Substrates MIS Devices MOSFET Plasma Oxidation Scandium Oxide Scavenging Effect |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Titolo uniforme | |
| Record Nr. | UNICAMPANIA-VAN00187568 |
|
Pampillón Arce, María Á.
|
||
| Cham, : Springer, 2017 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Vanvitelli | ||
| ||