Flash Lamp Annealing : From Basics to Application / Lars Rebohle, Slawomir Prucnal, Denise Reichel
| Flash Lamp Annealing : From Basics to Application / Lars Rebohle, Slawomir Prucnal, Denise Reichel |
| Autore | Rebohle, Lars |
| Pubbl/distr/stampa | Cham, : Springer, 2019 |
| Descrizione fisica | xviii, 288 p. : ill. ; 24 cm |
| Altri autori (Persone) |
Prucnal, Slawomir
Reichel, Denise |
| Soggetto topico |
82-XX - Statistical mechanics, structure of matter [MSC 2020]
78-XX - Optics, electromagnetic theory [MSC 2020] 00A79 (77-XX) - Physics [MSC 2020] 83-XX - Relativity and gravitational theory [MSC 2020] |
| Soggetto non controllato |
FLA assisted deposition
High-k dielectrics High-k materials Millisecond annealing Semiconductor Nanostructures Transparent conducting oxides |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Titolo uniforme | |
| Record Nr. | UNICAMPANIA-VAN0215761 |
Rebohle, Lars
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| Cham, : Springer, 2019 | ||
| Lo trovi qui: Univ. Vanvitelli | ||
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Flash Lamp Annealing : From Basics to Application / Lars Rebohle, Slawomir Prucnal, Denise Reichel
| Flash Lamp Annealing : From Basics to Application / Lars Rebohle, Slawomir Prucnal, Denise Reichel |
| Autore | Rebohle, Lars |
| Pubbl/distr/stampa | Cham, : Springer, 2019 |
| Descrizione fisica | xviii, 288 p. : ill. ; 24 cm |
| Altri autori (Persone) |
Prucnal, Slawomir
Reichel, Denise |
| Soggetto topico |
00A79 (77-XX) - Physics [MSC 2020]
78-XX - Optics, electromagnetic theory [MSC 2020] 82-XX - Statistical mechanics, structure of matter [MSC 2020] 83-XX - Relativity and gravitational theory [MSC 2020] |
| Soggetto non controllato |
FLA assisted deposition
High-k dielectrics High-k materials Millisecond annealing Semiconductor Nanostructures Transparent conducting oxides |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Titolo uniforme | |
| Record Nr. | UNICAMPANIA-VAN00215761 |
Rebohle, Lars
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| Cham, : Springer, 2019 | ||
| Lo trovi qui: Univ. Vanvitelli | ||
| ||
Proceedings of the Sixth International Symposium on Dielectric Materials and Applications (ISyDMA’6) / Ashok Vaseashta ... [et al.] editors
| Proceedings of the Sixth International Symposium on Dielectric Materials and Applications (ISyDMA’6) / Ashok Vaseashta ... [et al.] editors |
| Autore | International Symposium on Dielectric Materials and Applications : 6. : 2021 |
| Pubbl/distr/stampa | Cham, : Springer, 2022 |
| Descrizione fisica | xxv, 271 p. : ill. ; 24 cm |
| Soggetto topico |
00B25 - Proceedings of conferences of miscellaneous specific interest [MSC 2020]
78-XX - Optics, electromagnetic theory [MSC 2020] |
| Soggetto non controllato |
Condensed Matter Physics
Dielectric materials for electronics and photonics Dielectric properties Gate dielectrics High-k dielectrics Impedance spectroscopy applications Industrial and biomedical applications Polarization phenomena and applications Pyroelectric and ferroelectric materials |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNICAMPANIA-VAN00283731 |
International Symposium on Dielectric Materials and Applications : 6. : 2021
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| Cham, : Springer, 2022 | ||
| Lo trovi qui: Univ. Vanvitelli | ||
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