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1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA
| 1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA |
| Pubbl/distr/stampa | [Place of publication not identified], : Northern California Chapter of the American Vacuum Society, 1996 |
| Disciplina | 621.3815/2 |
| Soggetto topico |
Semiconductor wafers - Congresses
Semiconductors - Congresses - Effect of radiation on Plasma radiation - Congresses Electrical & Computer Engineering Electrical Engineering Engineering & Applied Sciences |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNISA-996206561303316 |
| [Place of publication not identified], : Northern California Chapter of the American Vacuum Society, 1996 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. di Salerno | ||
| ||
1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA
| 1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA |
| Pubbl/distr/stampa | [Place of publication not identified], : Northern California Chapter of the American Vacuum Society, 1996 |
| Disciplina | 621.3815/2 |
| Soggetto topico |
Semiconductor wafers - Congresses
Semiconductors - Congresses - Effect of radiation on Plasma radiation - Congresses Electrical & Computer Engineering Electrical Engineering Engineering & Applied Sciences |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910872918203321 |
| [Place of publication not identified], : Northern California Chapter of the American Vacuum Society, 1996 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
