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15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society
15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society
Pubbl/distr/stampa IEEE
Disciplina 621.3815/2
Soggetto topico Semiconductors - Heat treatment
Rapid thermal processing
Semiconductor doping
Semiconductors - Defects
ISBN 1-5090-8215-8
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Altri titoli varianti 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Computer and Automation Engineering
Record Nr. UNISA-996279733003316
IEEE
Materiale a stampa
Lo trovi qui: Univ. di Salerno
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15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society
15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society
Pubbl/distr/stampa IEEE
Disciplina 621.3815/2
Soggetto topico Semiconductors - Heat treatment
Rapid thermal processing
Semiconductor doping
Semiconductors - Defects
ISBN 9781509082155
1509082158
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Altri titoli varianti 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Computer and Automation Engineering
Record Nr. UNINA-9910143021203321
IEEE
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui
IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP
IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP
Pubbl/distr/stampa Piscataway, N.J., : IEEE, ©2002-
Disciplina 537.622
Soggetto topico Semiconductors - Heat treatment
Rapid thermal processing
Semiconductor doping
Semiconductors - Defects
Soggetto genere / forma Periodicals.
Conference papers and proceedings.
ISSN 1944-026X
Formato Materiale a stampa
Livello bibliografico Periodico
Lingua di pubblicazione eng
Altri titoli varianti RTP
Advanced thermal processing of semiconductors
Rapid Thermal Processing
Proceedings of the IEEE International Conference on Advanced Thermal Processing of Semiconductors
Record Nr. UNISA-996279733603316
Piscataway, N.J., : IEEE, ©2002-
Materiale a stampa
Lo trovi qui: Univ. di Salerno
Opac: Controlla la disponibilità qui
IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP
IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP
Pubbl/distr/stampa Piscataway, N.J., : IEEE, ©2002-
Disciplina 537.622
Soggetto topico Semiconductors - Heat treatment
Rapid thermal processing
Semiconductor doping
Semiconductors - Defects
Semi-conducteurs - Traitement thermique
Recuit thermique rapide
Semi-conducteurs - Dopage
Semi-conducteurs - Défauts
Soggetto genere / forma Periodicals.
Conference papers and proceedings.
ISSN 1944-026X
Formato Materiale a stampa
Livello bibliografico Periodico
Lingua di pubblicazione eng
Altri titoli varianti RTP
Advanced thermal processing of semiconductors
Rapid Thermal Processing
Proceedings of the IEEE International Conference on Advanced Thermal Processing of Semiconductors
Record Nr. UNINA-9910625192903321
Piscataway, N.J., : IEEE, ©2002-
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui
RTP 2001 : 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / / D.P. DeWitt ... [et al.], editors
RTP 2001 : 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / / D.P. DeWitt ... [et al.], editors
Pubbl/distr/stampa IEEE
Altri autori (Persone) DeWittDavid P. <1934->
Soggetto topico Semiconductors - Heat treatment
Rapid thermal processing
Semiconductor doping
Semiconductors - Defects
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Record Nr. UNISA-996217252403316
IEEE
Materiale a stampa
Lo trovi qui: Univ. di Salerno
Opac: Controlla la disponibilità qui
RTP 2001 : 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / / D.P. DeWitt ... [et al.], editors
RTP 2001 : 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / / D.P. DeWitt ... [et al.], editors
Pubbl/distr/stampa IEEE
Altri autori (Persone) DeWittDavid P. <1934->
Soggetto topico Semiconductors - Heat treatment
Rapid thermal processing
Semiconductor doping
Semiconductors - Defects
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Record Nr. UNINA-9910872548303321
IEEE
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui
Subsecond annealing of advanced materials : annealing by lasers, flash lamps and swift heavy ions / / Wolfgang Skorupa, Heidemarie Schmidt, editors
Subsecond annealing of advanced materials : annealing by lasers, flash lamps and swift heavy ions / / Wolfgang Skorupa, Heidemarie Schmidt, editors
Edizione [1st ed. 2014.]
Pubbl/distr/stampa Cham [Switzerland] : , : Springer, , 2014
Descrizione fisica 1 online resource (xvii, 321 pages) : illustrations (some color)
Disciplina 621.38152
Collana Springer Series in Materials Science
Soggetto topico Rapid thermal processing
ISBN 3-319-03131-7
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Nota di contenuto From the Contents: The very early time -- Nanonet formation by constitutional supercooling of pulsed laser annealed, Mn-implanted germanium -- Metastable activation of dopants by solid phase epitaxial recrystallization -- Superconducting Ga-implanted Germanium -- Structural changes in SiGe/Si layers induced by fast crystallization.
Record Nr. UNINA-9910298461403321
Cham [Switzerland] : , : Springer, , 2014
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui