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Enhanced optical filter design / / David Cushing
| Enhanced optical filter design / / David Cushing |
| Autore | Cushing David <d. 2009.> |
| Pubbl/distr/stampa | Bellingham, Wash., : SPIE Press, c2011 |
| Descrizione fisica | 1 online resource (168 p.) |
| Disciplina | 621.36/9 |
| Collana | SPIE |
| Soggetto topico |
Optical coatings
Light filters Optical films |
| ISBN |
9781523132041
1523132043 9781680150971 1680150979 9780819483591 0819483591 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Basics -- Methods of deposition and materials -- Antireflection coatings -- Multilayer films -- Dichroics -- Metal films and filters -- All-dielectric bandpass filters -- Optical monitoring -- Fully blocked visible filters -- Fully blocked ultraviolet filters -- Nonpolarizing reflection filters -- Nonpolarizing transmissive filters. |
| Record Nr. | UNINA-9911004737303321 |
Cushing David <d. 2009.>
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| Bellingham, Wash., : SPIE Press, c2011 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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EUV lithography [[electronic resource] /] / Vivek Bakshi, editor
| EUV lithography [[electronic resource] /] / Vivek Bakshi, editor |
| Pubbl/distr/stampa | Bellingham, Wash., : SPIE Press, : John Wiley & Sons, c2009 |
| Descrizione fisica | 1 online resource (702 p.) |
| Disciplina | 621.3815 |
| Altri autori (Persone) | BakshiVivek |
| Collana | SPIE Press monograph |
| Soggetto topico |
Ultraviolet radiation - Industrial applications
Photolithography Optical coatings |
| ISBN |
1-61583-717-5
0-8194-8070-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
1. EUV Lithography: A Historical Perspective / Hiroo Kinoshita and Obert Wood -- Introduction -- The Early Stage of Development: 1981 to 1992 -- The Second Stage of Development: 1993 to 1996 -- Other Developments in Japan and Europe -- The Development of Individual Technologies -- EUVL Conferences -- Summary.
2. EUV LLC: An Historical Perspective / Chuck Gwyn and Stefan Wurm -- Introduction -- Formation of the LLC -- Program Structure -- Program Results -- Retrospective Observations -- Status of EUV Development at the End of LLC -- Summary. 3. EUV Source Technology / Vivek Bakshi-- Introduction -- EUV Source Requirements -- DPP and LPP Source Technologies -- EUV Source Performance -- Summary and Future Outlook. 4A. Optics and Multilayer Coatings for EUVL Systems / Regina Soufli, Saša Bajt, Russell M. Hudyma and John S. Taylor -- Introduction -- Properties of EUVL Systems. 4B. Projection Systems for Extreme Ultraviolet Lithography / Russell M. Hudyma and Regina Soufli -- General EUVL Optical Design Considerations -- EUV Microsteppers -- Engineering Test Stand (ETS) -- Six-Mirror EUVL Projection Systems. 4C. Specification, Fabrication, Testing, and Mounting of EUVL Optical Substrates / John S. Taylor and Regina Soufli -- Introduction -- Specification -- Projection Optics -- Effect of Substrate Errors on Imaging Performance -- Low-Frequency (Figure) Errors -- Mid-Spatial-Frequency Errors -- High-Spatial-Frequency Errors -- Influence of Coatings on Roughness Specification -- Calculation of Surface Errors -- Uniformity -- Substrate Materials -- Fabrication -- Metrology -- Mounting and Assembly -- Alignment -- Condenser Optics. 4D. Multilayer Coatings for EUVL / Regina Soufli and Saša Bajt -- Overview and History of EUV Multilayer Coatings -- Choice of ML Materials and Wavelength Considerations -- Multilayer Deposition Technologies -- Theoretical design -- High Reflectivity, Low Stress, and Thermal Stability Considerations -- Optical Constants -- Multilayer Thickness Specifications for Imaging and Condenser EUVL Mirrors. 5. EUV Optical Testing / Kenneth A. Goldberg -- Introduction -- Target Accuracy -- Techniques for Angstrom-scale EUV Wavefront Measurement Accuracy -- Intercomparison -- Future Directions. 6A. Optics Contamination / Saša Bajt -- Introduction -- Fundamentals of Optics Contamination -- Optics Contamination Control -- Summary and Future Outlook. 6B. Grazing Angle Collector Contamination / Valentino Rigato -- Introduction -- Collector Lifetime Status and Challenges -- Summary. 6C. Normal Incidence (Multilayer) Collector Contamination / David N. Ruzic and Shailendra N. Srivastava -- Introduction -- Overview of Normal-Incidence Collector Mirrors -- Collector Performance -- Summary. 7. EUV Mask and Mask Metrology / Han-Ku Cho and Jinho Ahn -- Introduction -- EUV Mask Structure and Process Flow -- Mask Substrate -- Mask Blank Fabrication -- Absorber Stack and Backside Conductive Coating -- Mask Patterning -- Mask Cleaning -- Advanced Mask Structure -- Summary and Future Outlook. 8. Photoresists for Extreme Ultraviolet Lithography / Robert L. Brainard -- Introduction -- Earliest EUV Resist Imaging -- Absorption Coefficients of EUV Photoresists -- Multilayer Resists and Pattern Transfer -- Resist Types -- PAGs and Acids -- Line Edge Roughness -- Summary and Future Outlook. 9. High-Resolution EUV Imaging Tools for Resist Exposure and Aerial Image Monitoring / Malcolm Gower -- Introduction -- EUV Tool Design Considerations -- EUV Microstepper -- Reticle Imaging Microscope -- Summary and Future Outlook. 10. Fundamentals of the EUVL Scanner / Kazuya Ota -- Introduction -- Illumination Optics -- Projection Optics -- Stages -- Sensors -- Handling Systems -- Vacuum and Environment System -- Budgets -- Summary. 11. EUVL System Patterning Performance / Patrick Naulleau, John E. Bjorkholm, and Manish Chandhok -- Introduction: The Benefits of EUV Imaging -- Imaging with the 0.1-NA ETS Optic -- Imaging with the 0.3-NA MET Optic -- System Contributors to Line Edge Roughness -- Flare in EUVL Systems -- Summary. 12. Lithography Cost of Ownership / Phil Seidel -- Cost of Ownership Overview -- Lithography: Historical Cost and Price Trends -- Major Lithography CoO Parameter and Productivity Drivers -- General Observations on Lithography Cell and CoO Improvements (Past Decade) -- CoO Considerations for Future Lithography Technologies -- Summary -- Appendix: Example Case Studies of Lithography CoO Calculations. |
| Altri titoli varianti | Extreme ultraviolet lithography |
| Record Nr. | UNINA-9911004833203321 |
| Bellingham, Wash., : SPIE Press, : John Wiley & Sons, c2009 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical coating technology / / Philip W. Baumeister
| Optical coating technology / / Philip W. Baumeister |
| Autore | Baumeister Philip |
| Pubbl/distr/stampa | Bellingham, Wash., : SPIE Optical Engineering Press, 2004 |
| Descrizione fisica | 1 online resource (840 p.) |
| Disciplina | 681/.4 |
| Collana | SPIE Press monograph |
| Soggetto topico | Optical coatings |
| ISBN |
1-61583-745-0
0-8194-8102-5 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Chapter 1. How coatings are used and integrated into optical systems -- 1.1. Fabrication of multilayer interference devices -- 1.2. Nomenclature and general properties -- 1.3. Antireflection coatings -- 1.4. Spectral filtering and narrowband rejection -- 1.5. Filters with broad spectral bandwidth -- 1.6. Bandpasses -- 1.7. Reflectors used principally at normal incidence -- 1.8. Beamdividers, dichroics and polarizers -- 1.9. Miscellaneous topics -- 1.10. Appendices --
Chapter 2. Fundamentals -- 2.0. Overview of chapter -- 2.1. Overview of intuitive approach -- 2.2. Reflection and transmission at an interface -- 2.3. Phase shift upon reflection and node of the standing wave -- 2.4. Properties of a multilayer -- 2.5. Design concepts used at nonnormal incidence -- 2.6. Aids to computation -- 2.7. Properties of a stack with equal optical thickness layers -- 2.8. Graphical aids to multilayer design -- 2.9. Standing waves, net flux ratio and absorption -- 2.10. Appendices: Propagation of electromagnetic waves -- 2.11. Appendices -- Chapter 3. Thin films, the building blocks of multilayers -- 3.0. Purpose of this chapter -- 3.1. Methods of depositing a thin film, a conceptual view -- 3.2. Deposition methods, hardware and procedures -- 3.3. Overview of physical vapor deposition and film formation -- 3.4. Process parameters influencing optical properties -- 3.5. Criteria for thin film material selection -- 3.6. Survey of coating materials -- 3.7. Appendix: List of useful coating materials -- Chapter 4. Reflection reducing coatings -- 4.0. Introduction -- 4.1. Antireflection coating design by computer optimization -- 4.2. Design methods and evaluation of antireflection coatings -- 4.3. Multiple quarterwave and other narrowband designs -- 4.4. All-dielectric antireflection coatings deposited upon metallic layers -- 4.5. Coatings with broader spectral bandwidth, maximally flat designs -- 4.6. Coating with zero reflectance at two or more wavelengths -- 4.7. Chebyshev antireflection coatings -- 4.8. Step-up and step-down of admittance -- 4.9. Miscellaneous topics -- 4.10. Appendix: Proofs, derivations and designs -- Chapter 5. Reflectors, edge filters and periodic structures -- 5.1 Introduction -- 5.2. Analysis of the basic period -- 5.3. Single-stack coatings -- 5.4. Edge filter design -- 5.5. Broadband reflectors and rejection filters -- 5.6. Phase shift upon reflection -- 5.7. Miscellaneous topics -- 5.8. Appendices -- Chapter 6. Beamdividers and polarizers -- 6.1. Introduction -- 6.2. Nonimmersed linear polarizers containing quarterwave layers -- 6.3. Immersed linear polarizers -- 6.4. Nonpolarizing nonimmersed designs -- 6.5. Nonpolarizing immersed coatings -- 6.6. Miscellaneous topics -- 6.7. Appendices containing derivations -- 6.8. Appendices containing multilayer designs -- Chapter 7. All-dielectric bandpass filters -- 7.1. Introduction -- 7.2. Control of the spectral bandwidth -- 7.3. Periodic-structure bandpass design method -- 7.4. Filter design using two components -- 7.5. Periodic structures containing three materials -- 7.6. Microwave design method -- 7.7. Examples of conventional bandpass design -- 7.8. Bandpasses for optical fiber communication -- 7.9. Additional topics -- 7.10. Miscellaneous topics and appendices -- Chapter 8. Coatings that contain absorbing layers -- 8.1. Introduction -- 8.2. Bandpass filters, general properties -- 8.3. Design procedures for metal-dielectric bandpass filters -- 8.4. Bandpass filter design examples -- 8.5. Dark mirror absorber -- 8.6. Reflectors -- 8.7. Beamdivider containing silver -- 8.8. Neutral density coatings -- 8.9. Miscellaneous topics -- Chapter 9. Coating deposition -- 9.1. Introduction -- 9.2. Cleaning of a substrate prior to coating it -- 9.3. Tooling, initial pumpdown, ion bombardment and heating of substrates -- 9.4. Thin film deposition -- 9.5. Collection of the evaporant upon the substrates -- 9.6. The control of layer thickness during deposition -- 9.7. Mechanical stress in optical coatings -- 9.8. Appendices -- Chapter 10. Miscellaneous topics -- 10.0. Overview of chapter -- 10.1. Graphical aids to multilayer design -- 10.2. Optimization -- 10.3. Overall transmittance of an array of coated objects -- 10.4. Performance of coatings, their optical characteristics -- 10.5. Performance of coatings and their non-optical characteristics -- 10.6. Phase relations in multilayers -- 10.7. The influence of a coating upon a transmitted or reflected wavefront -- Chapter 11. References to the literature -- Chapter 12. Notation and definitions of terminology -- 12.1. Symbols, general comments -- 12.2. Symbols -- 12.3. Glossary of terminology -- Chapter 13. Index. |
| Record Nr. | UNINA-9911004821703321 |
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Baumeister Philip
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| Bellingham, Wash., : SPIE Optical Engineering Press, 2004 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical coatings and thermal noise in precision measurement / / edited by Gregory Harry, Timothy P. Bodiya and Riccardo DeSalvo [[electronic resource]]
| Optical coatings and thermal noise in precision measurement / / edited by Gregory Harry, Timothy P. Bodiya and Riccardo DeSalvo [[electronic resource]] |
| Pubbl/distr/stampa | Cambridge : , : Cambridge University Press, , 2012 |
| Descrizione fisica | 1 online resource (xiv, 328 pages) : digital, PDF file(s) |
| Disciplina | 621.36 |
| Soggetto topico |
Optical coatings
Quantum optics Light - Scattering Electromagnetic waves - Scattering |
| ISBN |
1-107-22691-0
1-280-48450-0 9786613579485 1-139-20555-2 1-139-20336-3 1-139-20634-6 1-139-20194-8 1-139-20476-9 0-511-76231-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Machine generated contents note: 1. Theory of thermal noise in optical mirrors Y. Levin; 2. Coating technology S. Chao; 3. Compendium of thermal noises in optical mirrors V.B. Braginsky, M.L. Gorodetsky and S.P. Vyatchanin; 4. Coating thermal noise I. Martin and S. Reid; 5. Direct measurements of coating thermal noise K. Numata; 6. Methods of improving thermal noise S. Ballmer and K. Somiya; 7. Substrate thermal noise S. Rowan and I. Martin; 8. Cryogenics K. Numata and K. Yamamoto; 9. Thermo-optic noise M. Evans and G. Ogin; 10. Absorption and thermal issues P. Willems, D. Ottaway and P. Beyersdorf; 11. Optical scatter J.R. Smith and M.E. Zucker; 12. Reflectivity and thickness optimisation I.M. Pinto, M. Principe and R. DeSalvo; 13. Beam shaping A. Freise; 14. Gravitational wave detection D. Ottaway and S.D. Penn; 15. High-precision laser stabilisation via optical cavities M.J. Martin and J. Ye; 16. Quantum optomechanics G.D. Cole and M. Aspelmeyer; 17. Cavity quantum electrodynamics T.E. Northup. |
| Altri titoli varianti | Optical Coatings & Thermal Noise in Precision Measurement |
| Record Nr. | UNINA-9910461524903321 |
| Cambridge : , : Cambridge University Press, , 2012 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical coatings and thermal noise in precision measurement / / edited by Gregory Harry, Timothy P. Bodiya and Riccardo DeSalvo [[electronic resource]]
| Optical coatings and thermal noise in precision measurement / / edited by Gregory Harry, Timothy P. Bodiya and Riccardo DeSalvo [[electronic resource]] |
| Pubbl/distr/stampa | Cambridge : , : Cambridge University Press, , 2012 |
| Descrizione fisica | 1 online resource (xiv, 328 pages) : digital, PDF file(s) |
| Disciplina | 621.36 |
| Soggetto topico |
Optical coatings
Quantum optics Light - Scattering Electromagnetic waves - Scattering |
| ISBN |
1-107-22691-0
1-280-48450-0 9786613579485 1-139-20555-2 1-139-20336-3 1-139-20634-6 1-139-20194-8 1-139-20476-9 0-511-76231-3 |
| Classificazione | SCI053000 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Machine generated contents note: 1. Theory of thermal noise in optical mirrors Y. Levin; 2. Coating technology S. Chao; 3. Compendium of thermal noises in optical mirrors V.B. Braginsky, M.L. Gorodetsky and S.P. Vyatchanin; 4. Coating thermal noise I. Martin and S. Reid; 5. Direct measurements of coating thermal noise K. Numata; 6. Methods of improving thermal noise S. Ballmer and K. Somiya; 7. Substrate thermal noise S. Rowan and I. Martin; 8. Cryogenics K. Numata and K. Yamamoto; 9. Thermo-optic noise M. Evans and G. Ogin; 10. Absorption and thermal issues P. Willems, D. Ottaway and P. Beyersdorf; 11. Optical scatter J.R. Smith and M.E. Zucker; 12. Reflectivity and thickness optimisation I.M. Pinto, M. Principe and R. DeSalvo; 13. Beam shaping A. Freise; 14. Gravitational wave detection D. Ottaway and S.D. Penn; 15. High-precision laser stabilisation via optical cavities M.J. Martin and J. Ye; 16. Quantum optomechanics G.D. Cole and M. Aspelmeyer; 17. Cavity quantum electrodynamics T.E. Northup. |
| Altri titoli varianti | Optical Coatings & Thermal Noise in Precision Measurement |
| Record Nr. | UNINA-9910790471003321 |
| Cambridge : , : Cambridge University Press, , 2012 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical thin films : user handbook / / James D. Rancourt
| Optical thin films : user handbook / / James D. Rancourt |
| Autore | Rancourt James D |
| Pubbl/distr/stampa | Bellingham, Wash., : SPIE Optical Engineering Press, c1996 |
| Descrizione fisica | xii, 289 p. : ill |
| Disciplina | 621.3815/2 |
| Collana | SPIE Press monograph |
| Soggetto topico |
Optical coatings
Thin films - Optical properties Optical films Light filters |
| ISBN |
1-61583-738-8
0-8194-8044-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Preface -- 1. Introduction to optical thin films. 1.1. Interference of light; 1.2. Spectral ranges and materials section; 1.3. Angle of incidence effects -- 2. Deposition technology. 2.1. Coating processes; 2.2. Coating parameters; 2.3. Coating equipment; 2.4. Stress effects; 2.5. Substrate cleaning -- 3. Performance of optical filters. 3.1. Reflectance, transmittance, and absorption; 3.2. Absorption and scattering; 3.3. Blocking ranges; 3.4. Filters in series: incoherent addition of intensities; 3.5. Standing wave electric fields; 3.6. Performance shifts with angle of incidence; 3.7. Other parameters that affect performance; 3.8. Wavefront distortions -- 4. Design types. 4.1. Antireflection coatings; 4.2. High reflection designs; 4.3. Edge filters; 4.4. Bandpass filters; 4.5. Beam splitters; 4.6. Other filters -- 5. Filter performance and measurements. 5.1. Spectrophotometers and spectrophotometry; 5.2. Environmental performance and measurements; 5.3. Aging; 5.4. Cosmetic and other visual deficiencies; 5.5. Inspection lot size -- 6. Substrates and materials. 6.1. Substrates in general; 6.2. Substrate types; 6.3. Safety glass; 6.4. Substrate specifications; 6.5. Blocking properties; 6.6. Reststrahl bands; 6.7. Island formation in thin films; 6.8. Thermal runaway in semiconductors; 6.9. Number of materials in multilayer coatings; 6.10. Toxicity.
7. Future prospects. 7.1. Ion beams; 7.2. Nonvacuum processes; 7.3. Inhomogeneous films; 7.4. Codeposition; 7.5. X-ray coatings; 7.6. Equipment advances: automatic coating machines; 7.7. Materials research -- A. How to specify optical filters -- B. Selected United States military specifications that relate to thin film optical filters -- C. Basic program to calculate thin film filter performance -- References -- Index. |
| Record Nr. | UNINA-9911004812403321 |
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Rancourt James D
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| Bellingham, Wash., : SPIE Optical Engineering Press, c1996 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical Thin Films and Coatings : From Materials to Applications / / edited by Angela Piegari, François Flory
| Optical Thin Films and Coatings : From Materials to Applications / / edited by Angela Piegari, François Flory |
| Edizione | [Second edition.] |
| Pubbl/distr/stampa | Duxford, United Kingdom : , : Woodhead Publishing, , 2018 |
| Descrizione fisica | 1 online resource (xxvii, 832 pages) : illustrations |
| Disciplina | 621.38 |
| Collana | Woodhead Publishing Series in Electronic and Optical Materials |
| Soggetto topico |
Optical coatings
Optical films |
| ISBN | 0-08-102073-2 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910583316803321 |
| Duxford, United Kingdom : , : Woodhead Publishing, , 2018 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical thin films and coatings : from materials to applications / / edited by Angela Piegari and François Flory
| Optical thin films and coatings : from materials to applications / / edited by Angela Piegari and François Flory |
| Pubbl/distr/stampa | Philadelphia, PA : , : Woodhead Pub., , 2013 |
| Descrizione fisica | 1 online resource (869 p.) |
| Disciplina |
681
681.4 681/.4 |
| Altri autori (Persone) |
PiegariAngela
FloryFrançois |
| Collana | Woodhead Publishing series in electronic and optical materials |
| Soggetto topico |
Optical films
Optical coatings Thin films |
| Soggetto genere / forma | Electronic books. |
| ISBN | 0-85709-731-8 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | part I. Design and manufacturing of optical thin films and coatings -- part II. Unconventional features of optical thin films and coatings -- part III. Novel materials for optical thin films and coatings -- part IV. Applications of optical thin films and coatings. |
| Record Nr. | UNINA-9910462673203321 |
| Philadelphia, PA : , : Woodhead Pub., , 2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical thin films and coatings : from materials to applications / / edited by Angela Piegari and Francois Flory
| Optical thin films and coatings : from materials to applications / / edited by Angela Piegari and Francois Flory |
| Pubbl/distr/stampa | Cambridge, UK : , : Woodhead Publishing, , 2013 |
| Descrizione fisica | 1 online resource (xxvii, 835 pages) : illustrations |
| Disciplina |
681
681.4 681/.4 |
| Collana | Woodhead Publishing series in electronic and optical materials |
| Soggetto topico |
Optical films
Optical coatings |
| ISBN | 0-85709-731-8 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | part I. Design and manufacturing of optical thin films and coatings -- part II. Unconventional features of optical thin films and coatings -- part III. Novel materials for optical thin films and coatings -- part IV. Applications of optical thin films and coatings. |
| Record Nr. | UNINA-9910787651403321 |
| Cambridge, UK : , : Woodhead Publishing, , 2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Optical thin films and coatings : from materials to applications / / edited by Angela Piegari and Francois Flory
| Optical thin films and coatings : from materials to applications / / edited by Angela Piegari and Francois Flory |
| Pubbl/distr/stampa | Cambridge, UK : , : Woodhead Publishing, , 2013 |
| Descrizione fisica | 1 online resource (xxvii, 835 pages) : illustrations |
| Disciplina |
681
681.4 681/.4 |
| Collana | Woodhead Publishing series in electronic and optical materials |
| Soggetto topico |
Optical films
Optical coatings |
| ISBN | 0-85709-731-8 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | part I. Design and manufacturing of optical thin films and coatings -- part II. Unconventional features of optical thin films and coatings -- part III. Novel materials for optical thin films and coatings -- part IV. Applications of optical thin films and coatings. |
| Record Nr. | UNINA-9910816780703321 |
| Cambridge, UK : , : Woodhead Publishing, , 2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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