Beam technologies for integrated processing [[electronic resource] ] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
Pubbl/distr/stampa | Washington, D.C., : National Academy Press, 1992 |
Descrizione fisica | 1 online resource (101 p.) |
Disciplina | 621.381 |
Soggetto topico |
Microelectronics industry
Molecular beams - Industrial applications Microelectronics - Materials Plasma-enhanced chemical vapor deposition - Industrial applications |
Soggetto genere / forma | Electronic books. |
ISBN |
1-280-21147-4
9786610211470 0-309-58395-0 0-585-14945-3 |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNINA-9910455972503321 |
Washington, D.C., : National Academy Press, 1992 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
|
Beam technologies for integrated processing [[electronic resource] ] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
Pubbl/distr/stampa | Washington, D.C., : National Academy Press, 1992 |
Descrizione fisica | 1 online resource (101 p.) |
Disciplina | 621.381 |
Soggetto topico |
Microelectronics industry
Molecular beams - Industrial applications Microelectronics - Materials Plasma-enhanced chemical vapor deposition - Industrial applications |
ISBN |
1-280-21147-4
9786610211470 0-309-58395-0 0-585-14945-3 |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNINA-9910778508703321 |
Washington, D.C., : National Academy Press, 1992 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
|
Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
Edizione | [1st ed.] |
Pubbl/distr/stampa | Washington, D.C., : National Academy Press, 1992 |
Descrizione fisica | 1 online resource (101 p.) |
Disciplina | 621.381 |
Soggetto topico |
Microelectronics industry
Molecular beams - Industrial applications Microelectronics - Materials Plasma-enhanced chemical vapor deposition - Industrial applications |
ISBN |
1-280-21147-4
9786610211470 0-309-58395-0 0-585-14945-3 |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Nota di contenuto |
BEAM TECHNOLOGIES FOR INTEGRATED PROCESSING -- Copyright -- ABSTRACT -- PREFACE -- ACKNOWLEDGMENTS -- Contents -- 1 Introduction -- 2 SUMMARY AND RECOMMENDATIONS -- SUMMARY -- Electronic Materials -- Engineered Materials -- Integrated Processing -- RECOMMENDATIONS -- 3 BEAM TECHNOLOGIES -- ATOMIC AND MOLECULAR MATERIAL BEAMS -- Physical Vapor Deposition -- Direct Evaporation Processes -- Direct Reactive Evaporation Processes -- Direct Sputtering Processes -- Reactive Sputtering Processes -- Ion Beam Sputtering Processes -- Molecular Beam Epitaxy -- Chemical Vapor Deposition Processes -- Microwave Electron Cyclotron Resonance Plasmas -- Ion Beams -- Energy Beams -- Laser Beams -- Electron Beams -- X-Ray Lithography -- Microwave Beams -- REFERENCES -- 4 BEAM APPLICATIONS IN MICROELECTRONICS -- BEAM APPLICATIONS IN SEMICONDUCTOR DEVICE MANUFACTURE -- Silicon Integrated Circuits -- Beam Technologies For Materials Deposition -- Beam Technologies For Patterning -- Beam Technologies For Etching -- BEAM TECHNOLOGIES FOR COMPOUND SEMICONDUCTOR ICS -- Beam Technologies For Materials Deposition -- Beam Technologies For Heating -- OPTOELECTRONICS -- REFERENCES -- 5 BEAM APPLICATIONS IN ENGINEERED MATERIALS -- COATINGS -- Diamond, Diamond-Like Carbon, And Cubic Boron Nitride Coatings -- SURFACE MODIFICATION -- APPLICATIONS OF LASERS TO MATERIALS FORMING -- Shaping And Removal -- Desktop Deposition -- Joining -- POWDER PREPARATION -- COMPOSITES FABRICATION -- Fiber And Whisker Preparation -- Metal-Matrix Composites Fabrication -- Ceramic-Matrix Composites Fabrication -- NANOPHASE MATERIALS -- OPTICAL SURFACES AND DEVICES -- POLYMERS -- MATERIALS FOR ENERGY PRODUCTION -- BIOIMPLANT DEVICES -- REFERENCES -- 6 INTEGRATED PROCESSING -- INTEGRATED PROCESSING IN MICROELECTRONICS -- Integrated Processing For Integrated Circuits.
Traditional Integrated Circuit Processing Techniques -- Advances Toward Integrated Processing -- Integrated Processing Tools -- Applications For Integrated Processing Tools -- INTEGRATED PROCESSING FOR METALS AND CERAMICS -- Architectural Glass Coatings -- In-Line Dry Coating Process For Stainless Steel Sheet -- Mechanical Fabrication -- REFERENCES -- 7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION -- REFERENCE -- APPENDIX A ACRONYMS AND ABBREVIATIONS -- APPENDIX B BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS. |
Record Nr. | UNINA-9910828540303321 |
Washington, D.C., : National Academy Press, 1992 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
|