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Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
Pubbl/distr/stampa [Place of publication not identified], : Japan Society of Applied Physics, 2004
Disciplina 621.3815/31
Soggetto topico Microfabrication - Very large scale integration - Design and construction
Integrated circuits
Lithography
Nanotechnology
Microelectronics
Physics
Physical Sciences & Mathematics
Atomic Physics
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Record Nr. UNISA-996206243603316
[Place of publication not identified], : Japan Society of Applied Physics, 2004
Materiale a stampa
Lo trovi qui: Univ. di Salerno
Opac: Controlla la disponibilità qui
Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
Pubbl/distr/stampa [Place of publication not identified], : Japan Society of Applied Physics, 2004
Disciplina 621.3815/31
Soggetto topico Microfabrication - Very large scale integration - Design and construction
Integrated circuits
Lithography
Nanotechnology
Microelectronics
Physics
Physical Sciences & Mathematics
Atomic Physics
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Record Nr. UNINA-9910872557103321
[Place of publication not identified], : Japan Society of Applied Physics, 2004
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui