Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan |
Pubbl/distr/stampa | [Place of publication not identified], : Japan Society of Applied Physics, 2004 |
Disciplina | 621.3815/31 |
Soggetto topico |
Microfabrication - Very large scale integration - Design and construction
Integrated circuits Lithography Nanotechnology Microelectronics Physics Physical Sciences & Mathematics Atomic Physics |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNISA-996206243603316 |
[Place of publication not identified], : Japan Society of Applied Physics, 2004 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. di Salerno | ||
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Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan |
Pubbl/distr/stampa | [Place of publication not identified], : Japan Society of Applied Physics, 2004 |
Disciplina | 621.3815/31 |
Soggetto topico |
Microfabrication - Very large scale integration - Design and construction
Integrated circuits Lithography Nanotechnology Microelectronics Physics Physical Sciences & Mathematics Atomic Physics |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNINA-9910872557103321 |
[Place of publication not identified], : Japan Society of Applied Physics, 2004 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
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