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Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
| Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| Pubbl/distr/stampa | Washington, D.C., : National Academy Press, 1991 |
| Descrizione fisica | 1 online resource (87 p.) |
| Disciplina | 621.044 |
| Soggetto topico |
Plasma engineering
Microelectronics - Materials - Effect of radiation on Surfaces (Technology) |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-280-20336-6
9786610203369 0-309-58375-6 0-585-08463-7 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910456249303321 |
| Washington, D.C., : National Academy Press, 1991 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
| Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| Pubbl/distr/stampa | Washington, D.C., : National Academy Press, 1991 |
| Descrizione fisica | 1 online resource (87 p.) |
| Disciplina | 621.044 |
| Soggetto topico |
Plasma engineering
Microelectronics - Materials - Effect of radiation on Surfaces (Technology) |
| ISBN |
1-280-20336-6
9786610203369 0-309-58375-6 0-585-08463-7 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910778507903321 |
| Washington, D.C., : National Academy Press, 1991 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
| Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| Pubbl/distr/stampa | Washington, D.C., : National Academy Press, 1991 |
| Descrizione fisica | 1 online resource (87 p.) |
| Disciplina | 621.044 |
| Soggetto topico |
Plasma engineering
Microelectronics - Materials - Effect of radiation on Surfaces (Technology) |
| ISBN |
1-280-20336-6
9786610203369 0-309-58375-6 0-585-08463-7 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910817008203321 |
| Washington, D.C., : National Academy Press, 1991 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
