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2012 70th Annual Device Research Conference
| 2012 70th Annual Device Research Conference |
| Pubbl/distr/stampa | [Place of publication not identified], : IEEE, 2012 |
| Descrizione fisica | 1 online resource (278 pages) |
| Disciplina | 621.381 |
| Soggetto topico |
Microelectromechanical systems - Reliability
Microelectromechanical systems - Design and construction |
| ISBN | 1-4673-1164-2 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNISA-996215694403316 |
| [Place of publication not identified], : IEEE, 2012 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. di Salerno | ||
| ||
2012 70th Annual Device Research Conference
| 2012 70th Annual Device Research Conference |
| Pubbl/distr/stampa | [Place of publication not identified], : IEEE, 2012 |
| Descrizione fisica | 1 online resource (278 pages) |
| Disciplina | 621.381 |
| Soggetto topico |
Microelectromechanical systems - Reliability
Microelectromechanical systems - Design and construction |
| ISBN | 1-4673-1164-2 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910130687003321 |
| [Place of publication not identified], : IEEE, 2012 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Reliability of MEMS [[electronic resource] ] : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya
| Reliability of MEMS [[electronic resource] ] : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya |
| Edizione | [2nd ed.] |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, 2013 |
| Descrizione fisica | 1 online resource (325 p.) |
| Disciplina | 539.60113 |
| Altri autori (Persone) |
TabataOsamu
TsuchiyaToshiyuki |
| Collana | Advanced micro & nanosystems |
| Soggetto topico | Microelectromechanical systems - Reliability |
| Soggetto genere / forma | Electronic books. |
| ISBN | 3-527-67503-5 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Title Page; Preface; Foreword; Contents; List of Contributors; Overview; 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization; 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating - Substrate Systems; 3 Thin film Characterization Using the Bulge Test; 4 Uniaxial Tensile Test for MEMS Materials; 5 On chip Testing of MEMS; 6 Reliability of a Capacitive Pressure Sensor; 7 Inertial Sensors; 8 High accuracy, High reliability MEMS Accelerometer; 9 Reliability of MEMS Variable Optical Attenuator; 10 Eco Scan MEMS Resonant Mirror; Index |
| Record Nr. | UNINA-9910462702003321 |
| Weinheim, : Wiley-VCH, 2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Reliability of MEMS [[electronic resource] ] : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya
| Reliability of MEMS [[electronic resource] ] : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya |
| Edizione | [2nd ed.] |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, 2013 |
| Descrizione fisica | 1 online resource (325 p.) |
| Disciplina | 539.60113 |
| Altri autori (Persone) |
TabataOsamu
TsuchiyaToshiyuki |
| Collana | Advanced micro & nanosystems |
| Soggetto topico | Microelectromechanical systems - Reliability |
| ISBN | 3-527-67503-5 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Title Page; Preface; Foreword; Contents; List of Contributors; Overview; 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization; 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating - Substrate Systems; 3 Thin film Characterization Using the Bulge Test; 4 Uniaxial Tensile Test for MEMS Materials; 5 On chip Testing of MEMS; 6 Reliability of a Capacitive Pressure Sensor; 7 Inertial Sensors; 8 High accuracy, High reliability MEMS Accelerometer; 9 Reliability of MEMS Variable Optical Attenuator; 10 Eco Scan MEMS Resonant Mirror; Index |
| Record Nr. | UNINA-9910786109203321 |
| Weinheim, : Wiley-VCH, 2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Reliability of MEMS : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya
| Reliability of MEMS : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya |
| Edizione | [2nd ed.] |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, 2013 |
| Descrizione fisica | 1 online resource (325 p.) |
| Disciplina | 539.60113 |
| Altri autori (Persone) |
TabataOsamu
TsuchiyaToshiyuki |
| Collana | Advanced micro & nanosystems |
| Soggetto topico | Microelectromechanical systems - Reliability |
| ISBN | 3-527-67503-5 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Title Page; Preface; Foreword; Contents; List of Contributors; Overview; 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization; 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating - Substrate Systems; 3 Thin film Characterization Using the Bulge Test; 4 Uniaxial Tensile Test for MEMS Materials; 5 On chip Testing of MEMS; 6 Reliability of a Capacitive Pressure Sensor; 7 Inertial Sensors; 8 High accuracy, High reliability MEMS Accelerometer; 9 Reliability of MEMS Variable Optical Attenuator; 10 Eco Scan MEMS Resonant Mirror; Index |
| Record Nr. | UNINA-9910814657603321 |
| Weinheim, : Wiley-VCH, 2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Reliability of MEMS [[electronic resource] /] / edited by Osamu Tabata and Toshiyuki Tsuchiya
| Reliability of MEMS [[electronic resource] /] / edited by Osamu Tabata and Toshiyuki Tsuchiya |
| Edizione | [11th ed.] |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, c2008 |
| Descrizione fisica | 1 online resource (0 p.) |
| Disciplina | 615.7 |
| Altri autori (Persone) |
TsuchiyaToshiyuki
TabataOsamu <1956-> |
| Collana | Advanced micro & nanosystems |
| Soggetto topico |
Microelectromechanical systems - Reliability
Electrical engineering |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-281-94693-1
9786611946937 3-527-62213-6 3-527-62256-X |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910144096303321 |
| Weinheim, : Wiley-VCH, c2008 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Reliability of MEMS [[electronic resource] /] / edited by Osamu Tabata and Toshiyuki Tsuchiya
| Reliability of MEMS [[electronic resource] /] / edited by Osamu Tabata and Toshiyuki Tsuchiya |
| Edizione | [11th ed.] |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, c2008 |
| Descrizione fisica | 1 online resource (0 p.) |
| Disciplina | 615.7 |
| Altri autori (Persone) |
TsuchiyaToshiyuki
TabataOsamu <1956-> |
| Collana | Advanced micro & nanosystems |
| Soggetto topico |
Microelectromechanical systems - Reliability
Electrical engineering |
| ISBN |
1-281-94693-1
9786611946937 3-527-62213-6 3-527-62256-X |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910829996103321 |
| Weinheim, : Wiley-VCH, c2008 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Reliability of MEMS [[electronic resource] /] / edited by Osamu Tabata and Toshiyuki Tsuchiya
| Reliability of MEMS [[electronic resource] /] / edited by Osamu Tabata and Toshiyuki Tsuchiya |
| Edizione | [11th ed.] |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, c2008 |
| Descrizione fisica | 1 online resource (0 p.) |
| Disciplina | 615.7 |
| Altri autori (Persone) |
TsuchiyaToshiyuki
TabataOsamu <1956-> |
| Collana | Advanced micro & nanosystems |
| Soggetto topico |
Microelectromechanical systems - Reliability
Electrical engineering |
| ISBN |
1-281-94693-1
9786611946937 3-527-62213-6 3-527-62256-X |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910841421503321 |
| Weinheim, : Wiley-VCH, c2008 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
