Semiconductor measurement technology : the results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon / / Barbara J. Belzer, David L. Blackburn |
Autore | Belzer Barbara J |
Pubbl/distr/stampa | Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1997 |
Descrizione fisica | 1 online resource |
Altri autori (Persone) |
BelzerBarbara J
BlackburnDavid L |
Collana | NIST special publication |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Altri titoli varianti | Semiconductor measurement technology |
Record Nr. | UNINA-9910711191203321 |
Belzer Barbara J | ||
Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1997 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
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Semiconductor measurement technology : a bibliography of NBS publications for the years 1962-1986 / / Jane Walters |
Autore | Walters Jane |
Pubbl/distr/stampa | Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1987 |
Descrizione fisica | 1 online resource |
Altri autori (Persone) | WaltersJane |
Collana | NBSIR |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Altri titoli varianti | Semiconductor measurement technology |
Record Nr. | UNINA-9910709925603321 |
Walters Jane | ||
Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1987 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
|
Semiconductor measurement technology : a bibliography of NBS publications for the years 1962-1985 / / Jane Walters |
Autore | Walters Jane |
Pubbl/distr/stampa | Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1986 |
Descrizione fisica | 1 online resource |
Altri autori (Persone) | WaltersJane |
Collana | NBSIR |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Altri titoli varianti | Semiconductor measurement technology |
Record Nr. | UNINA-9910710551303321 |
Walters Jane | ||
Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1986 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
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