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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
| Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena |
| Pubbl/distr/stampa | New York, : Published for the Society by the American Institute of Physics |
| Disciplina | 621.381/05 |
| ISSN | 1071-1023 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Periodico |
| Lingua di pubblicazione | eng |
| Altri titoli varianti |
Microelectronics and nanometer structures
Journal of vacuum science and technology., Microelectronics and nanometer structures JVST B |
| Note periodicità | Bimestrale |
| Record Nr. | UNINA-990008995860403321 |
| New York, : Published for the Society by the American Institute of Physics | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Journal of vacuum science and technology . B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
| Journal of vacuum science and technology . B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B |
| Pubbl/distr/stampa | New York, NY, : AVS through the American Institute of Physics |
| Disciplina | 621 |
| Soggetto topico |
Nanotechnology
Microelectronics |
| Soggetto genere / forma | Periodicals. |
| ISSN | 2166-2754 |
| Formato | Materiale a stampa |
| Livello bibliografico | Periodico |
| Lingua di pubblicazione | eng |
| Altri titoli varianti |
Nanotechnology & microelectronics
Nanotechnology and microelectronics Journal of vacuum science and technology. processing, measurement, & phenomena JVST B Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena |
| Record Nr. | UNISA-996546670303316 |
| New York, NY, : AVS through the American Institute of Physics | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. di Salerno | ||
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Journal of vacuum science and technology . B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
| Journal of vacuum science and technology . B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B |
| Pubbl/distr/stampa | New York, NY, : AVS through the American Institute of Physics |
| Disciplina | 621 |
| Soggetto topico |
Nanotechnology
Microelectronics |
| Soggetto genere / forma | Periodicals. |
| ISSN | 2166-2754 |
| Formato | Materiale a stampa |
| Livello bibliografico | Periodico |
| Lingua di pubblicazione | eng |
| Altri titoli varianti |
Nanotechnology & microelectronics
Nanotechnology and microelectronics Journal of vacuum science and technology. processing, measurement, & phenomena JVST B Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena |
| Record Nr. | UNINA-9910139689103321 |
| New York, NY, : AVS through the American Institute of Physics | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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