15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society
| 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society |
| Pubbl/distr/stampa | IEEE |
| Disciplina | 621.3815/2 |
| Soggetto topico |
Semiconductors - Heat treatment
Rapid thermal processing Semiconductor doping Semiconductors - Defects |
| ISBN | 1-5090-8215-8 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Altri titoli varianti |
2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Computer and Automation Engineering |
| Record Nr. | UNISA-996279733003316 |
| IEEE | ||
| Lo trovi qui: Univ. di Salerno | ||
| ||
15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society
| 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / / IEEE Electron Devices Society |
| Pubbl/distr/stampa | IEEE |
| Disciplina | 621.3815/2 |
| Soggetto topico |
Semiconductors - Heat treatment
Rapid thermal processing Semiconductor doping Semiconductors - Defects |
| ISBN |
9781509082155
1509082158 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Altri titoli varianti |
2007 15th International Conference on Advanced Thermal Processing of Semiconductors
Computer and Automation Engineering |
| Record Nr. | UNINA-9910143021203321 |
| IEEE | ||
| Lo trovi qui: Univ. Federico II | ||
| ||