2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA |
Pubbl/distr/stampa | [Place of publication not identified], : AVS, 2002 |
Disciplina | 621.3815/2 |
Soggetto topico |
Semiconductor wafers - Effect of radiation on
Semiconductors Plasma radiation Electrical & Computer Engineering Engineering & Applied Sciences Electrical Engineering |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNISA-996206559003316 |
[Place of publication not identified], : AVS, 2002 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. di Salerno | ||
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2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA |
Pubbl/distr/stampa | [Place of publication not identified], : AVS, 2002 |
Disciplina | 621.3815/2 |
Soggetto topico |
Semiconductor wafers - Effect of radiation on
Semiconductors Plasma radiation Electrical & Computer Engineering Engineering & Applied Sciences Electrical Engineering |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Record Nr. | UNINA-9910872931603321 |
[Place of publication not identified], : AVS, 2002 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
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