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Handbook of vacuum science and technology [[electronic resource] /] / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III
| Handbook of vacuum science and technology [[electronic resource] /] / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III |
| Pubbl/distr/stampa | San Diego, CA, : Academic Press, c1998 |
| Descrizione fisica | 1 online resource (861 p.) |
| Disciplina |
621.5/5 21
621.55 |
| Altri autori (Persone) |
HoffmanDorothy M. SinghBawa ThomasJohn H |
| Soggetto topico |
Vacuum technology
Mechanical engineering |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-281-05935-8
9786611059354 0-08-053375-2 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; HANDBOOK OF VACUUM SCIENCE AND TECHNOLOGY; Copyright Page; Contents; Preface; List of Contributors; Part 1: Fundamentals of Vacuum Technology and Surface Physics; Chapter 1.1. Vacuum Nomenclature and Definitions; 1.1.1 Basic Definition; 1.1.2 Pressure Regions of Vacuum; Chapter 1.2. Gas Properties; 1.2.1 Description of Vacuum as a Low-Pressure Gas; 1.2.2 Characteristics of a Gas-Basic Definitions; 1.2.3 Gas Laws; Chapter 1.3. Molecular Processes and Kinetic Theory; 1.3.1 General Description; 1.3.2 Molecular Motion; 1.3.3 Kinetic Theory Derivation of the Gas Laws; 1.3.4 Pressure
1.3.5 Molecular Mean Free Path1.3.6 Number of Impacts with the Chamber Wall; 1.3.7 Time to Form a Monolayer; 1.3.8 Thermal Transpiration; 1.3.9 Coefficient of Thermal Conductivity; 1.3.10 Coefficient of Diffusion; Chapter 1.4. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate; Chapter 1.5. Gas Flow; 1.5.1 Nature of Gas Flow; 1.5.2 Turbulent Flow; 1.5.3 Viscous, Streamline, or Laminar Flow; 1.5.4 Molecular Flow; 1.5.5 Flow Relationships; Chapter 1.6. Conductance; 1.6.1 Conductance; 1.6.2 Conductances in Parallel; 1.6.3 Conductances in Series Chapter 1.7. Flow Calculations1.7.1 Equations for Viscous Flow; 1.7.2 Equations for Molecular Flow; 1.7.3 Knudsen's Formulation; 1.7.4 Clausing Factors; Chapter 1.8. Surface Physics and Its Relation to Vacuum Science; 1.8.1 Physical Adsorption or ""Adsorption""; 1.8.2 Chemisorption; 1.8.3 Sticking Coefficient; 1.8.4 Surface Area; 1.8.5 Surface Adsorption Isotherms; 1.8.6 Capillary Action; 1.8.7 Condensation; 1.8.8 Desorption Phenomena; 1.8.9 Thermal Desorption; 1.8.10 Photoactivation; 1.8.11 Ultrasonic Desorption; 1.8.12 Electron- and Ion-Stimulated Desorption 1.8.13 Gas Release from SurfacesReferences; Part 2: Creation of Vacuum; Chapter 2.1. Technology of Vacuum Pumps - An Overview; 2.1.1 Vacuum Pump Function Basics; 2.1.2 Gas Transport: Throughput; 2.1.3 Performance Parameters; 2.1.4 Pumping Speed; 2.1.5 Pumpdown Time; 2.1.6 Ultimate Pressure; 2.1.7 Forevacuum and High-Vacuum Pumping; 2.1.8 Pump System Relationships; 2.1.9 Crossover from Rough to High-Vacuum Pumps; 2.1.10 Pumping System Design; References; Chapter 2.2. Diaphragm Pumps; 2.2.1 Introduction: Basics and Operating Principle; 2.2.2 State-of-the-Art Design and Manufacturing 2.2.3 Performance and Technical Data2.2.4 Modular Concept for Specific Application Setups: Standalone Operation; 2.2.5 Diaphragm Pumps as Backing and Auxiliary Pumps in Vacuum Systems; References; Chapter 2.3. Vacuum Blowers; 2.3.1 Introduction; 2.3.2 Equipment Description; 2.3.3 Blower Operating Principle; 2.3.4 Blower Pumping Efficiency; 2.3.5 Blower Pumping Speed Calculations; 2.3.6 Power Requirements; 2.3.7 Temperature Considerations; 2.3.8 Flow and Compression Ratio Control Mechanisms; 2.3.9 Liquid-Sealed Blowers; 2.3.10 Selected System Arrangements Chapter 2.4. Vacuum Jet Pumps (Diffusion Pumps) |
| Record Nr. | UNINA-9910458390703321 |
| San Diego, CA, : Academic Press, c1998 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Handbook of vacuum science and technology [[electronic resource] /] / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III
| Handbook of vacuum science and technology [[electronic resource] /] / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III |
| Pubbl/distr/stampa | San Diego, CA, : Academic Press, c1998 |
| Descrizione fisica | 1 online resource (861 p.) |
| Disciplina |
621.5/5 21
621.55 |
| Altri autori (Persone) |
HoffmanDorothy M. SinghBawa ThomasJohn H |
| Soggetto topico |
Vacuum technology
Mechanical engineering |
| ISBN |
1-281-05935-8
9786611059354 0-08-053375-2 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; HANDBOOK OF VACUUM SCIENCE AND TECHNOLOGY; Copyright Page; Contents; Preface; List of Contributors; Part 1: Fundamentals of Vacuum Technology and Surface Physics; Chapter 1.1. Vacuum Nomenclature and Definitions; 1.1.1 Basic Definition; 1.1.2 Pressure Regions of Vacuum; Chapter 1.2. Gas Properties; 1.2.1 Description of Vacuum as a Low-Pressure Gas; 1.2.2 Characteristics of a Gas-Basic Definitions; 1.2.3 Gas Laws; Chapter 1.3. Molecular Processes and Kinetic Theory; 1.3.1 General Description; 1.3.2 Molecular Motion; 1.3.3 Kinetic Theory Derivation of the Gas Laws; 1.3.4 Pressure
1.3.5 Molecular Mean Free Path1.3.6 Number of Impacts with the Chamber Wall; 1.3.7 Time to Form a Monolayer; 1.3.8 Thermal Transpiration; 1.3.9 Coefficient of Thermal Conductivity; 1.3.10 Coefficient of Diffusion; Chapter 1.4. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate; Chapter 1.5. Gas Flow; 1.5.1 Nature of Gas Flow; 1.5.2 Turbulent Flow; 1.5.3 Viscous, Streamline, or Laminar Flow; 1.5.4 Molecular Flow; 1.5.5 Flow Relationships; Chapter 1.6. Conductance; 1.6.1 Conductance; 1.6.2 Conductances in Parallel; 1.6.3 Conductances in Series Chapter 1.7. Flow Calculations1.7.1 Equations for Viscous Flow; 1.7.2 Equations for Molecular Flow; 1.7.3 Knudsen's Formulation; 1.7.4 Clausing Factors; Chapter 1.8. Surface Physics and Its Relation to Vacuum Science; 1.8.1 Physical Adsorption or ""Adsorption""; 1.8.2 Chemisorption; 1.8.3 Sticking Coefficient; 1.8.4 Surface Area; 1.8.5 Surface Adsorption Isotherms; 1.8.6 Capillary Action; 1.8.7 Condensation; 1.8.8 Desorption Phenomena; 1.8.9 Thermal Desorption; 1.8.10 Photoactivation; 1.8.11 Ultrasonic Desorption; 1.8.12 Electron- and Ion-Stimulated Desorption 1.8.13 Gas Release from SurfacesReferences; Part 2: Creation of Vacuum; Chapter 2.1. Technology of Vacuum Pumps - An Overview; 2.1.1 Vacuum Pump Function Basics; 2.1.2 Gas Transport: Throughput; 2.1.3 Performance Parameters; 2.1.4 Pumping Speed; 2.1.5 Pumpdown Time; 2.1.6 Ultimate Pressure; 2.1.7 Forevacuum and High-Vacuum Pumping; 2.1.8 Pump System Relationships; 2.1.9 Crossover from Rough to High-Vacuum Pumps; 2.1.10 Pumping System Design; References; Chapter 2.2. Diaphragm Pumps; 2.2.1 Introduction: Basics and Operating Principle; 2.2.2 State-of-the-Art Design and Manufacturing 2.2.3 Performance and Technical Data2.2.4 Modular Concept for Specific Application Setups: Standalone Operation; 2.2.5 Diaphragm Pumps as Backing and Auxiliary Pumps in Vacuum Systems; References; Chapter 2.3. Vacuum Blowers; 2.3.1 Introduction; 2.3.2 Equipment Description; 2.3.3 Blower Operating Principle; 2.3.4 Blower Pumping Efficiency; 2.3.5 Blower Pumping Speed Calculations; 2.3.6 Power Requirements; 2.3.7 Temperature Considerations; 2.3.8 Flow and Compression Ratio Control Mechanisms; 2.3.9 Liquid-Sealed Blowers; 2.3.10 Selected System Arrangements Chapter 2.4. Vacuum Jet Pumps (Diffusion Pumps) |
| Record Nr. | UNINA-9910784634503321 |
| San Diego, CA, : Academic Press, c1998 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Handbook of vacuum science and technology / / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III
| Handbook of vacuum science and technology / / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III |
| Edizione | [1st ed.] |
| Pubbl/distr/stampa | San Diego, CA, : Academic Press, c1998 |
| Descrizione fisica | 1 online resource (861 p.) |
| Disciplina |
621.5/5 21
621.55 |
| Altri autori (Persone) |
HoffmanDorothy M. SinghBawa ThomasJohn H |
| Soggetto topico |
Vacuum technology
Mechanical engineering |
| ISBN |
1-281-05935-8
9786611059354 0-08-053375-2 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; HANDBOOK OF VACUUM SCIENCE AND TECHNOLOGY; Copyright Page; Contents; Preface; List of Contributors; Part 1: Fundamentals of Vacuum Technology and Surface Physics; Chapter 1.1. Vacuum Nomenclature and Definitions; 1.1.1 Basic Definition; 1.1.2 Pressure Regions of Vacuum; Chapter 1.2. Gas Properties; 1.2.1 Description of Vacuum as a Low-Pressure Gas; 1.2.2 Characteristics of a Gas-Basic Definitions; 1.2.3 Gas Laws; Chapter 1.3. Molecular Processes and Kinetic Theory; 1.3.1 General Description; 1.3.2 Molecular Motion; 1.3.3 Kinetic Theory Derivation of the Gas Laws; 1.3.4 Pressure
1.3.5 Molecular Mean Free Path1.3.6 Number of Impacts with the Chamber Wall; 1.3.7 Time to Form a Monolayer; 1.3.8 Thermal Transpiration; 1.3.9 Coefficient of Thermal Conductivity; 1.3.10 Coefficient of Diffusion; Chapter 1.4. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate; Chapter 1.5. Gas Flow; 1.5.1 Nature of Gas Flow; 1.5.2 Turbulent Flow; 1.5.3 Viscous, Streamline, or Laminar Flow; 1.5.4 Molecular Flow; 1.5.5 Flow Relationships; Chapter 1.6. Conductance; 1.6.1 Conductance; 1.6.2 Conductances in Parallel; 1.6.3 Conductances in Series Chapter 1.7. Flow Calculations1.7.1 Equations for Viscous Flow; 1.7.2 Equations for Molecular Flow; 1.7.3 Knudsen's Formulation; 1.7.4 Clausing Factors; Chapter 1.8. Surface Physics and Its Relation to Vacuum Science; 1.8.1 Physical Adsorption or ""Adsorption""; 1.8.2 Chemisorption; 1.8.3 Sticking Coefficient; 1.8.4 Surface Area; 1.8.5 Surface Adsorption Isotherms; 1.8.6 Capillary Action; 1.8.7 Condensation; 1.8.8 Desorption Phenomena; 1.8.9 Thermal Desorption; 1.8.10 Photoactivation; 1.8.11 Ultrasonic Desorption; 1.8.12 Electron- and Ion-Stimulated Desorption 1.8.13 Gas Release from SurfacesReferences; Part 2: Creation of Vacuum; Chapter 2.1. Technology of Vacuum Pumps - An Overview; 2.1.1 Vacuum Pump Function Basics; 2.1.2 Gas Transport: Throughput; 2.1.3 Performance Parameters; 2.1.4 Pumping Speed; 2.1.5 Pumpdown Time; 2.1.6 Ultimate Pressure; 2.1.7 Forevacuum and High-Vacuum Pumping; 2.1.8 Pump System Relationships; 2.1.9 Crossover from Rough to High-Vacuum Pumps; 2.1.10 Pumping System Design; References; Chapter 2.2. Diaphragm Pumps; 2.2.1 Introduction: Basics and Operating Principle; 2.2.2 State-of-the-Art Design and Manufacturing 2.2.3 Performance and Technical Data2.2.4 Modular Concept for Specific Application Setups: Standalone Operation; 2.2.5 Diaphragm Pumps as Backing and Auxiliary Pumps in Vacuum Systems; References; Chapter 2.3. Vacuum Blowers; 2.3.1 Introduction; 2.3.2 Equipment Description; 2.3.3 Blower Operating Principle; 2.3.4 Blower Pumping Efficiency; 2.3.5 Blower Pumping Speed Calculations; 2.3.6 Power Requirements; 2.3.7 Temperature Considerations; 2.3.8 Flow and Compression Ratio Control Mechanisms; 2.3.9 Liquid-Sealed Blowers; 2.3.10 Selected System Arrangements Chapter 2.4. Vacuum Jet Pumps (Diffusion Pumps) |
| Record Nr. | UNINA-9910822266303321 |
| San Diego, CA, : Academic Press, c1998 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||