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EUV sources for lithography / / [edited by] Vivek Bakshi
| EUV sources for lithography / / [edited by] Vivek Bakshi |
| Pubbl/distr/stampa | Bellingham, Wash., : SPIE Press, c2006 |
| Descrizione fisica | 1 online resource (1094 p.) |
| Disciplina | 621.36/4 |
| Altri autori (Persone) | BakshiVivek |
| Collana | SPIE Press monograph |
| Soggetto topico |
Ultraviolet radiation - Industrial applications
Extreme ultraviolet lithography Plasma (Ionized gases) Lithography |
| ISBN |
1-61583-716-7
0-8194-8071-1 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | section 1. Introduction and technology review -- section 2. Fundamentals and modeling -- section 3. Plasma pinch soureces -- section 4. Laser-produced plasma (LPP) sources -- section 5. EUV source metrology -- section 6. Other types of EUV sources -- section 7. EUV source components. |
| Record Nr. | UNINA-9911004829503321 |
| Bellingham, Wash., : SPIE Press, c2006 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
IRMMW-THz 2005 : the Joint 30th International Conference on Infrared and Millimeter Waves & 13th International Conference on Terahertz Electronics : Williamsburg, Virginia, USA, September 19-September 23, 2005
| IRMMW-THz 2005 : the Joint 30th International Conference on Infrared and Millimeter Waves & 13th International Conference on Terahertz Electronics : Williamsburg, Virginia, USA, September 19-September 23, 2005 |
| Pubbl/distr/stampa | [Place of publication not identified], : IEEE, 2005 |
| Disciplina | 621.36/4 |
| Soggetto topico |
Millimeter wave devices
Infrared technology Far infrared lasers Free electron lasers High temperature superconductors Engineering & Applied Sciences Applied Physics |
| ISBN | 1-5090-9702-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNISA-996203436303316 |
| [Place of publication not identified], : IEEE, 2005 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. di Salerno | ||
| ||
IRMMW-THz 2005 : the Joint 30th International Conference on Infrared and Millimeter Waves & 13th International Conference on Terahertz Electronics : Williamsburg, Virginia, USA, September 19-September 23, 2005
| IRMMW-THz 2005 : the Joint 30th International Conference on Infrared and Millimeter Waves & 13th International Conference on Terahertz Electronics : Williamsburg, Virginia, USA, September 19-September 23, 2005 |
| Pubbl/distr/stampa | [Place of publication not identified], : IEEE, 2005 |
| Disciplina | 621.36/4 |
| Soggetto topico |
Millimeter wave devices
Infrared technology Far infrared lasers Free electron lasers High temperature superconductors Engineering & Applied Sciences Applied Physics |
| ISBN |
9781509097029
1509097023 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910146816203321 |
| [Place of publication not identified], : IEEE, 2005 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||