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Micro, nanosystems, and systems on chips [[electronic resource]] : modeling, control, and estimation / / edited by Alina Voda
Micro, nanosystems, and systems on chips [[electronic resource]] : modeling, control, and estimation / / edited by Alina Voda
Pubbl/distr/stampa London, : ISTE
Descrizione fisica 1 online resource (330 p.)
Disciplina 621.381
Altri autori (Persone) VodaAlina
Collana ISTE
Soggetto topico Microelectromechanical systems
Systems on a chip
ISBN 1-118-55781-6
1-299-31845-2
1-118-62267-7
1-61344-555-5
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Nota di contenuto Cover; Title Page; Copyright Page; Table of Contents; Introduction; PART I. MINI AND MICROSYSTEMS; Chapter 1. Modeling and Control of Stick-slip Micropositioning Devices; 1.1. Introduction; 1.2. General description of stick-slip micropositioning devices; 1.2.1. Principle; 1.2.2. Experimental device; 1.3. Model of the sub-step mode; 1.3.1. Assumptions; 1.3.2. Microactuator equation; 1.3.3. The elastoplastic friction model; 1.3.4. The state equation; 1.3.5. The output equation; 1.3.6. Experimental and simulation curves; 1.4. PI control of the sub-step mode; 1.5. Modeling the coarse mode
1.5.1. The model1.5.2. Experimental results; 1.5.3. Remarks; 1.6. Voltage/frequency (U/f) proportional control of the coarse mode; 1.6.1. Principle scheme of the proposed controller; 1.6.2. Analysis; 1.6.3. Stability analysis; 1.6.4. Experiments; 1.7. Conclusion; 1.8. Bibliography; Chapter 2. Microbeam Dynamic Shaping by Closed-loop Electrostatic Actuation using Modal Control; 2.1. Introduction; 2.2. System description; 2.3. Modal analysis; 2.4. Mode-based control; 2.4.1. PID control; 2.4.2. FSF-LTR control; 2.5. Conclusion; 2.6. Bibliography; PART II. NANOSYSTEMS AND NANOWORLD
Chapter 3. Observer-based Estimation of Weak Forces in a Nanosystem Measurement Device 3.1. Introduction; 3.2. Observer approach in an AFM measurement set-up; 3.2.1. Considered AFM model and force measurement problem; 3.2.2. Proposed observer approach; 3.2.3. Experimental application and validation; 3.3. Extension to back action evasion; 3.3.1. Back action problem and illustration; 3.3.2. Observer-based approach; 3.3.3. Simulation results and comments; 3.4. Conclusion; 3.5. Acknowledgements; 3.6. Bibliography
Chapter 4. Tunnel Current for a Robust, High-bandwidth and Ultraprecise Nanopositioning 4.1. Introduction; 4.2. System description; 4.2.1. Forces between the tip and the beam; 4.3. System modeling; 4.3.1. Cantilever model; 4.3.2. System actuators; 4.3.3. Tunnel current; 4.3.4. System model; 4.3.5. System analysis; 4.4. Problem statement; 4.4.1. Robustness and non-linearities; 4.4.2. Experimental noise; 4.5. Tools to deal with noise; 4.5.1. Kalman filter; 4.5.2. Minimum variance controller; 4.6. Closed-loop requirements; 4.6.1. Sensitivity functions; 4.6.2. Robustness margins
4.6.3. Templates of the sensibility functions 4.7. Control strategy; 4.7.1. Actuator linearization; 4.7.2. Sensor approximation; 4.7.3. Kalman filtering; 4.7.4. RST1 synthesis; 4.7.5. z reconstruction; 4.7.6. RST2 synthesis; 4.8. Results; 4.8.1. Position control; 4.8.2. Distance d control; 4.8.3. Robustness; 4.9. Conclusion; 4.10. Bibliography; Chapter 5. Controller Design and Analysis for High-performance STM; 5.1. Introduction; 5.2. General description of STM; 5.2.1. STM operation modes; 5.2.2. Principle; 5.3. Control design model; 5.3.1. Linear approximation approach
5.3.2. Open-loop analysis
Record Nr. UNINA-9910138300703321
London, : ISTE
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui
Micro, nanosystems, and systems on chips [[electronic resource]] : modeling, control, and estimation / / edited by Alina Voda
Micro, nanosystems, and systems on chips [[electronic resource]] : modeling, control, and estimation / / edited by Alina Voda
Edizione [1st ed.]
Pubbl/distr/stampa London, : ISTE
Descrizione fisica 1 online resource (330 p.)
Disciplina 621.381
Altri autori (Persone) VodaAlina
Collana ISTE
Soggetto topico Microelectromechanical systems
Systems on a chip
ISBN 1-118-55781-6
1-299-31845-2
1-118-62267-7
1-61344-555-5
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Nota di contenuto Cover; Title Page; Copyright Page; Table of Contents; Introduction; PART I. MINI AND MICROSYSTEMS; Chapter 1. Modeling and Control of Stick-slip Micropositioning Devices; 1.1. Introduction; 1.2. General description of stick-slip micropositioning devices; 1.2.1. Principle; 1.2.2. Experimental device; 1.3. Model of the sub-step mode; 1.3.1. Assumptions; 1.3.2. Microactuator equation; 1.3.3. The elastoplastic friction model; 1.3.4. The state equation; 1.3.5. The output equation; 1.3.6. Experimental and simulation curves; 1.4. PI control of the sub-step mode; 1.5. Modeling the coarse mode
1.5.1. The model1.5.2. Experimental results; 1.5.3. Remarks; 1.6. Voltage/frequency (U/f) proportional control of the coarse mode; 1.6.1. Principle scheme of the proposed controller; 1.6.2. Analysis; 1.6.3. Stability analysis; 1.6.4. Experiments; 1.7. Conclusion; 1.8. Bibliography; Chapter 2. Microbeam Dynamic Shaping by Closed-loop Electrostatic Actuation using Modal Control; 2.1. Introduction; 2.2. System description; 2.3. Modal analysis; 2.4. Mode-based control; 2.4.1. PID control; 2.4.2. FSF-LTR control; 2.5. Conclusion; 2.6. Bibliography; PART II. NANOSYSTEMS AND NANOWORLD
Chapter 3. Observer-based Estimation of Weak Forces in a Nanosystem Measurement Device 3.1. Introduction; 3.2. Observer approach in an AFM measurement set-up; 3.2.1. Considered AFM model and force measurement problem; 3.2.2. Proposed observer approach; 3.2.3. Experimental application and validation; 3.3. Extension to back action evasion; 3.3.1. Back action problem and illustration; 3.3.2. Observer-based approach; 3.3.3. Simulation results and comments; 3.4. Conclusion; 3.5. Acknowledgements; 3.6. Bibliography
Chapter 4. Tunnel Current for a Robust, High-bandwidth and Ultraprecise Nanopositioning 4.1. Introduction; 4.2. System description; 4.2.1. Forces between the tip and the beam; 4.3. System modeling; 4.3.1. Cantilever model; 4.3.2. System actuators; 4.3.3. Tunnel current; 4.3.4. System model; 4.3.5. System analysis; 4.4. Problem statement; 4.4.1. Robustness and non-linearities; 4.4.2. Experimental noise; 4.5. Tools to deal with noise; 4.5.1. Kalman filter; 4.5.2. Minimum variance controller; 4.6. Closed-loop requirements; 4.6.1. Sensitivity functions; 4.6.2. Robustness margins
4.6.3. Templates of the sensibility functions 4.7. Control strategy; 4.7.1. Actuator linearization; 4.7.2. Sensor approximation; 4.7.3. Kalman filtering; 4.7.4. RST1 synthesis; 4.7.5. z reconstruction; 4.7.6. RST2 synthesis; 4.8. Results; 4.8.1. Position control; 4.8.2. Distance d control; 4.8.3. Robustness; 4.9. Conclusion; 4.10. Bibliography; Chapter 5. Controller Design and Analysis for High-performance STM; 5.1. Introduction; 5.2. General description of STM; 5.2.1. STM operation modes; 5.2.2. Principle; 5.3. Control design model; 5.3.1. Linear approximation approach
5.3.2. Open-loop analysis
Record Nr. UNINA-9910808453903321
London, : ISTE
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui