Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos |
Autore | May Gary S. |
Pubbl/distr/stampa | [Piscataway, New Jersey] : , : IEEE, , c2006 |
Descrizione fisica | 1 online resource (485 p.) |
Disciplina |
621.3815/2
621.38152 |
Altri autori (Persone) | SpanosCostas J |
Soggetto topico |
Semiconductors - Design and construction
Integrated circuits - Design and construction Process control - Statistical methods |
ISBN |
1-280-45023-1
9786610450237 0-470-35916-1 0-471-79028-1 1-61583-845-7 0-471-79027-3 |
Formato | Materiale a stampa ![]() |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Nota di contenuto | Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. |
Record Nr. | UNINA-9910143417603321 |
May Gary S.
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[Piscataway, New Jersey] : , : IEEE, , c2006 | ||
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Lo trovi qui: Univ. Federico II | ||
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Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos |
Autore | May Gary S. |
Pubbl/distr/stampa | [Piscataway, New Jersey] : , : IEEE, , c2006 |
Descrizione fisica | 1 online resource (485 p.) |
Disciplina |
621.3815/2
621.38152 |
Altri autori (Persone) | SpanosCostas J |
Soggetto topico |
Semiconductors - Design and construction
Integrated circuits - Design and construction Process control - Statistical methods |
ISBN |
1-280-45023-1
9786610450237 0-470-35916-1 0-471-79028-1 1-61583-845-7 0-471-79027-3 |
Formato | Materiale a stampa ![]() |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Nota di contenuto | Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. |
Record Nr. | UNISA-996202373203316 |
May Gary S.
![]() |
||
[Piscataway, New Jersey] : , : IEEE, , c2006 | ||
![]() | ||
Lo trovi qui: Univ. di Salerno | ||
|
Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos |
Autore | May Gary S. |
Pubbl/distr/stampa | [Piscataway, New Jersey] : , : IEEE, , c2006 |
Descrizione fisica | 1 online resource (485 p.) |
Disciplina |
621.3815/2
621.38152 |
Altri autori (Persone) | SpanosCostas J |
Soggetto topico |
Semiconductors - Design and construction
Integrated circuits - Design and construction Process control - Statistical methods |
ISBN |
1-280-45023-1
9786610450237 0-470-35916-1 0-471-79028-1 1-61583-845-7 0-471-79027-3 |
Formato | Materiale a stampa ![]() |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Nota di contenuto | Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. |
Record Nr. | UNINA-9910830857403321 |
May Gary S.
![]() |
||
[Piscataway, New Jersey] : , : IEEE, , c2006 | ||
![]() | ||
Lo trovi qui: Univ. Federico II | ||
|