Autore	O'Hanlon John F. <1937->
Edizione	[3rd ed.]
Pubbl/distr/stampa	Hoboken, NJ, : Wiley-Interscience, c2003
Descrizione fisica	1 online resource (536 p.)
Disciplina	621.55
Soggetto topico	Vacuum technology
Soggetto genere / forma	Electronic books.
ISBN	1-280-25318-5 9786610253180 0-470-34294-3 0-471-46715-4 0-471-46716-2
Formato	Materiale a stampa
Livello bibliografico	Monografia
Lingua di pubblicazione	eng
Nota di contenuto	A User's Guide to Vacuum Technology; Contents; ITS BASIS; 1. Vacuum Technology; 1.1 Units of Measurement; References; 2. Gas Properties; 2.1 Kinetic Picture of a Gas; 2.1.1 Velocity Distribution; 2.1.2 Energy Distribution; 2.1.3 Mean Free Path; 2.1.4 Particle Flux; 2.1.5 Monolayer Formation Time; 2.1.6 Pressure; 2.2 Gas Laws; 2.2.1 Boyle's Law; 2.2.2 Amonton's Law; 2.2.3 Charles' Law; 2.2.4 Dalton's Law; 2.2.5 Avogadro's Law; 2.2.6 Graham's Law; 2.3 Elementary Gas Transport Phenomena; 2.3.1 Viscosity; 2.3.2 Thermal Conductivity; 2.3.3 Diffusion; 2.3.4 Thermal Transpiration; References Problems3. Gas Flow; 3.1 Flow Regimes; 3.2 Throughput, Mass Flow, and Conductance; 3.3 Continuum Flow; 3.3.1 Orifices; 3.3.2 Long Round Tubes; 3.3.3 Short Round Tubes; 3.4 Molecular Flow; 3.4.1 Orifices; 3.4.2 Long Round Tubes; 3.4.3 Short Round Tubes; 3.4.4 Other Short Structure Solutions; Analytical Solutions; Monte Carlo Technique; 3.4.5 Combining Molecular Conductances; Parallel Conductances; Series Conductances; Exit and Entrance Effects; Series Calculations; 3.5 The Transition Region; 3.6 Models Spanning Several Pressure Regions; 3.7 Summary of Flow Regimes; References; Problems 4. Gas Release from Solids4.1 Vaporization; 4.2 Diffusion; 4.2.1 Reduction of Outdiffusion by Vacuum Baking; 4.3 Thermal Desorption; 4.3.1 Desorption Without Readsorption; Zero-Order Desorption; First-Order Desorption; Second-Order Desorption; 4.3.2 Desorption from Real Surfaces; Outgassing Measurements; Outgassing Models; Reduction of Outgassing by Baking; 4.4 Stimulated Desorption; 4.4.1 Electron-Stimulated Desorption; 4.4.2 Ion-Stimulated Desorption; 4.4.3 Stimulated Chemical Reactions; 4.4.4 Photodesorption; 4.5 Permeation; 4.5.1 Molecular Permeation; 4.5.2 Dissociative Permeation 4.5.3 Permeation and Outgassing Units4.6 Pressure Limits; References; Problems; MEASUREMENT; 5. Pressure Gauges; 5.1 Direct-Reading Gauges; 5.1.1 Diaphragm and Bourdon Gauges; 5.1.2 Capacitance Manometers; 5.2 Indirect-Reading Gauges; 5.2.1 Thermal Conductivity Gauges; Pirani Gauge; Thermocouple Gauge; Stability and Calibration; 5.2.2 Spinning Rotor Gauge; 5.2.3 Ionization Gauges; Hot Cathode Gauges; Hot Cathode Gauge Errors; Cold Cathode Gauge; Gauge Calibration; References; Problems; 6. Flow Meters; 6.1 Molar Flow, Mass Flow, and Throughput; 6.2 Rotameters and Chokes 6.3 Differential Pressure Techniques6.4 Thermal Mass Flow Meter Technique; 6.4.1 Mass Flow Meter; 6.4.2 Mass Flow Controller; 6.4.3 Mass Flow Meter Calibration; References; Problems; 7. Pumping Speed; 7.1 Pumping Speed; 7.2 Mechanical Pumps; 7.3 High Vacuum Pumps; 7.3.1 Measurement Techniques; Pump Dependence; Measurement of Water Vapor Pumping Speed; Pumping Speed at the Chamber; 7.3.2 Measurement Error; References; Problems; 8. Residual Gas Analyzers; 8.1 Instrument Description; 8.1.1 Ion Sources; Open Ion Sources; Closed Ion Sources; 8.1.2 Mass Filters; Magnetic Sector; RF Quadrupole Resolving Power
Record Nr.	UNINA-9910146077203321