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Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos
| Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos |
| Autore | May Gary S. |
| Pubbl/distr/stampa | [Piscataway, New Jersey] : , : IEEE, , c2006 |
| Descrizione fisica | 1 online resource (485 p.) |
| Disciplina |
621.3815/2
621.38152 |
| Altri autori (Persone) | SpanosCostas J |
| Soggetto topico |
Semiconductors - Design and construction
Integrated circuits - Design and construction Process control - Statistical methods |
| ISBN |
1-280-45023-1
9786610450237 0-470-35916-1 0-471-79028-1 1-61583-845-7 0-471-79027-3 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. |
| Record Nr. | UNINA-9910143417603321 |
May Gary S.
|
||
| [Piscataway, New Jersey] : , : IEEE, , c2006 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos
| Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos |
| Autore | May Gary S. |
| Pubbl/distr/stampa | [Piscataway, New Jersey] : , : IEEE, , c2006 |
| Descrizione fisica | 1 online resource (485 p.) |
| Disciplina |
621.3815/2
621.38152 |
| Altri autori (Persone) | SpanosCostas J |
| Soggetto topico |
Semiconductors - Design and construction
Integrated circuits - Design and construction Process control - Statistical methods |
| ISBN |
1-280-45023-1
9786610450237 0-470-35916-1 0-471-79028-1 1-61583-845-7 0-471-79027-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. |
| Record Nr. | UNISA-996202373203316 |
|
May Gary S.
|
||
| [Piscataway, New Jersey] : , : IEEE, , c2006 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. di Salerno | ||
| ||
Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos
| Fundamentals of semiconductor manufacturing and process control / / Gary S. May, Costas J. Spanos |
| Autore | May Gary S. |
| Pubbl/distr/stampa | [Piscataway, New Jersey] : , : IEEE, , c2006 |
| Descrizione fisica | 1 online resource (485 p.) |
| Disciplina |
621.3815/2
621.38152 |
| Altri autori (Persone) | SpanosCostas J |
| Soggetto topico |
Semiconductors - Design and construction
Integrated circuits - Design and construction Process control - Statistical methods |
| ISBN |
1-280-45023-1
9786610450237 0-470-35916-1 0-471-79028-1 1-61583-845-7 0-471-79027-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. |
| Record Nr. | UNINA-9910830857403321 |
|
May Gary S.
|
||
| [Piscataway, New Jersey] : , : IEEE, , c2006 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||