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From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou
| From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou |
| Autore | Madou Marc J. |
| Edizione | [Third edition.] |
| Pubbl/distr/stampa | Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 |
| Descrizione fisica | 1 online resource (642 p.) |
| Disciplina | 620.5 |
| Soggetto topico |
Microelectromechanical systems
Nanoelectromechanical systems Microfluidics Solid state physics |
| Soggetto genere / forma | Electronic books. |
| ISBN |
0-429-10921-0
1-4200-5518-6 1-4398-9524-4 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices
Chapter 10: MEMS and NEMS ApplicationsBack Cover |
| Record Nr. | UNINA-9910460580203321 |
Madou Marc J.
|
||
| Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou
| From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou |
| Autore | Madou Marc J. |
| Edizione | [Third edition.] |
| Pubbl/distr/stampa | Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 |
| Descrizione fisica | 1 online resource (642 p.) |
| Disciplina | 620.5 |
| Soggetto topico |
Microelectromechanical systems
Nanoelectromechanical systems Microfluidics Solid state physics |
| ISBN |
0-429-10921-0
1-4200-5518-6 1-4398-9524-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices
Chapter 10: MEMS and NEMS ApplicationsBack Cover |
| Record Nr. | UNINA-9910797028703321 |
|
Madou Marc J.
|
||
| Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou
| From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou |
| Autore | Madou Marc J. |
| Edizione | [Third edition.] |
| Pubbl/distr/stampa | Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 |
| Descrizione fisica | 1 online resource (642 p.) |
| Disciplina | 620.5 |
| Soggetto topico |
Microelectromechanical systems
Nanoelectromechanical systems Microfluidics Solid state physics |
| ISBN |
0-429-10921-0
1-4200-5518-6 1-4398-9524-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices
Chapter 10: MEMS and NEMS ApplicationsBack Cover |
| Record Nr. | UNINA-9910800163403321 |
|
Madou Marc J.
|
||
| Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou
| From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou |
| Autore | Madou Marc J. |
| Edizione | [Third edition.] |
| Pubbl/distr/stampa | Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 |
| Descrizione fisica | 1 online resource (642 p.) |
| Disciplina | 620.5 |
| Soggetto topico |
Microelectromechanical systems
Nanoelectromechanical systems Microfluidics Solid state physics |
| ISBN |
0-429-10921-0
1-4200-5518-6 1-4398-9524-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices
Chapter 10: MEMS and NEMS ApplicationsBack Cover |
| Record Nr. | UNINA-9910829016703321 |
|
Madou Marc J.
|
||
| Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||