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Etching characteristics and surface analysis of molecular bean epitaxy grown P-type aluminum gallium nitride with boron trichloride/chlorine gases in inductively coupled plasma (ICP) dry etching / / Fred Semendy, Phillip Boyd, and Unchul Lee
| Etching characteristics and surface analysis of molecular bean epitaxy grown P-type aluminum gallium nitride with boron trichloride/chlorine gases in inductively coupled plasma (ICP) dry etching / / Fred Semendy, Phillip Boyd, and Unchul Lee |
| Autore | Semendy Fred |
| Pubbl/distr/stampa | Adelphi, MD : , : Army Research Laboratory, , [2004] |
| Descrizione fisica | 1 online resource (iv, 15 pages) : illustrations (chiefly color), color charts |
| Altri autori (Persone) |
BoydPhillip
LeeUnchul |
| Collana | ARL-TR |
| Soggetto topico |
Plasma etching
Gallium nitride |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Altri titoli varianti | Etching characteristics and surface analysis of molecular bean epitaxy grown P-type aluminum gallium nitride with boron trichloride/chlorine gases in inductively coupled plasma |
| Record Nr. | UNINA-9910697103903321 |
Semendy Fred
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| Adelphi, MD : , : Army Research Laboratory, , [2004] | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Observation and study of dislocation etch pits in molecular beam epitaxy grown gallium nitride with the use of phosphoric acid and molten potassium hydroxide / / Fred Semendy and Unchal Lee
| Observation and study of dislocation etch pits in molecular beam epitaxy grown gallium nitride with the use of phosphoric acid and molten potassium hydroxide / / Fred Semendy and Unchal Lee |
| Autore | Semendy Fred |
| Pubbl/distr/stampa | Adelphi, MD : , : Army Research Laboratory, , [2007] |
| Descrizione fisica | 1 online resource (iv, 12 pages) : illustrations (some color) |
| Collana | ARL-TR |
| Soggetto topico |
Gallium nitride - Etching
Dislocations in crystals |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910702704403321 |
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Semendy Fred
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| Adelphi, MD : , : Army Research Laboratory, , [2007] | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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