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NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / / edited by Lynn Khine and Julius M. Tsai
| NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / / edited by Lynn Khine and Julius M. Tsai |
| Pubbl/distr/stampa | Durnten-Zurich, Switzerland : , : Trans Tech Publications, , [2011] |
| Descrizione fisica | 1 online resource (233 p.) |
| Disciplina | 233 |
| Altri autori (Persone) |
KhineLynn
TsaiJulius M |
| Collana | Advanced materials research |
| Soggetto topico |
Nanoelectromechanical systems
Microelectromechanical systems |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-62198-685-3
3-03813-609-3 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force
A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement Focused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications; Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants; Tagging for Capsule Endoscopy Localization; The Negative π/2 Phase Shift of Total Reflect Light; High Topography Polyimide CMP Process; Hydridosilane Modification of Metals: An Exploratory Study; Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide |
| Record Nr. | UNINA-9910462324303321 |
| Durnten-Zurich, Switzerland : , : Trans Tech Publications, , [2011] | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / / edited by Lynn Khine and Julius M. Tsai
| NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / / edited by Lynn Khine and Julius M. Tsai |
| Pubbl/distr/stampa | Durnten-Zurich, Switzerland : , : Trans Tech Publications, , [2011] |
| Descrizione fisica | 1 online resource (233 p.) |
| Disciplina | 233 |
| Altri autori (Persone) |
KhineLynn
TsaiJulius M |
| Collana | Advanced materials research |
| Soggetto topico |
Nanoelectromechanical systems
Microelectromechanical systems |
| Soggetto non controllato |
NEMS/MEMS technology
Materials Advanced technologies ICMAT |
| ISBN |
1-62198-685-3
3-03813-609-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force
A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement Focused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications; Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants; Tagging for Capsule Endoscopy Localization; The Negative π/2 Phase Shift of Total Reflect Light; High Topography Polyimide CMP Process; Hydridosilane Modification of Metals: An Exploratory Study; Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide |
| Record Nr. | UNINA-9910785724803321 |
| Durnten-Zurich, Switzerland : , : Trans Tech Publications, , [2011] | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / / edited by Lynn Khine and Julius M. Tsai
| NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore / / edited by Lynn Khine and Julius M. Tsai |
| Pubbl/distr/stampa | Durnten-Zurich, Switzerland : , : Trans Tech Publications, , [2011] |
| Descrizione fisica | 1 online resource (233 p.) |
| Disciplina | 233 |
| Altri autori (Persone) |
KhineLynn
TsaiJulius M |
| Collana | Advanced materials research |
| Soggetto topico |
Nanoelectromechanical systems
Microelectromechanical systems |
| Soggetto non controllato |
NEMS/MEMS technology
Materials Advanced technologies ICMAT |
| ISBN |
1-62198-685-3
3-03813-609-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force
A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement Focused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications; Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants; Tagging for Capsule Endoscopy Localization; The Negative π/2 Phase Shift of Total Reflect Light; High Topography Polyimide CMP Process; Hydridosilane Modification of Metals: An Exploratory Study; Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide |
| Record Nr. | UNINA-9910815042803321 |
| Durnten-Zurich, Switzerland : , : Trans Tech Publications, , [2011] | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||