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Handbook of semiconductor wafer cleaning technology : science, technology, and applications
| Handbook of semiconductor wafer cleaning technology : science, technology, and applications |
| Pubbl/distr/stampa | [Place of publication not identified], : Noyes Publications, 1993 |
| Disciplina | 621.3815/2 |
| Collana | Materials science and process technology series. Handbook of semiconductor wafer cleaning technology |
| Soggetto topico |
Semiconductor wafers - Cleaning
Electrical & Computer Engineering Engineering & Applied Sciences Electrical Engineering |
| ISBN |
0-8155-1772-6
1-59124-093-X |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9911006684903321 |
| [Place of publication not identified], : Noyes Publications, 1993 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Handbook of silicon wafer cleaning technology / / edited by Karen Reinhardt, Werner Kern
| Handbook of silicon wafer cleaning technology / / edited by Karen Reinhardt, Werner Kern |
| Edizione | [Third edition.] |
| Pubbl/distr/stampa | Oxford, [England] ; ; Cambridge, [Massachusetts] : , : William Andrew, , 2018 |
| Descrizione fisica | 1 online resource (775 pages) |
| Disciplina | 621.38152 |
| Soggetto topico | Silicon-on-insulator technology |
| ISBN |
0-323-51085-X
0-323-51084-1 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910583322903321 |
| Oxford, [England] ; ; Cambridge, [Massachusetts] : , : William Andrew, , 2018 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Techniques for measuring the integrity of passivation overcoats on integrated circuits / / Werner Kern, Robert B. Comizzoli
| Techniques for measuring the integrity of passivation overcoats on integrated circuits / / Werner Kern, Robert B. Comizzoli |
| Autore | Kern Werner |
| Pubbl/distr/stampa | Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1977 |
| Descrizione fisica | 1 online resource |
| Altri autori (Persone) |
ComizzoliRobert B
KernWerner |
| Collana | NBS special publication |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910709506403321 |
Kern Werner
|
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| Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1977 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||