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Micro Electro Mechanical Systems [[electronic resource] /] / edited by Qing-An Huang
| Micro Electro Mechanical Systems [[electronic resource] /] / edited by Qing-An Huang |
| Pubbl/distr/stampa | Singapore : , : Springer Singapore : , : Imprint : Springer, , 2020 |
| Disciplina | 620.5 |
| Collana | Micro/Nano Technologies |
| Soggetto topico |
Nanotechnology
Mechatronics Electronics Microelectronics Microwaves Optical engineering Nanotechnology and Microengineering Electronics and Microelectronics, Instrumentation Microwaves, RF and Optical Engineering |
| ISBN | 981-10-2798-6 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems. |
| Record Nr. | UNINA-9910337609203321 |
| Singapore : , : Springer Singapore : , : Imprint : Springer, , 2020 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Micro Electro Mechanical Systems / / edited by Qing-An Huang
| Micro Electro Mechanical Systems / / edited by Qing-An Huang |
| Edizione | [1st ed. 2018.] |
| Pubbl/distr/stampa | Singapore : , : Springer Nature Singapore : , : Imprint : Springer, , 2018 |
| Descrizione fisica | 1 online resource (1122 illus., 876 illus. in color. eReference.) |
| Disciplina | 621.381 |
| Collana | Micro/Nano Technologies |
| Soggetto topico |
Mechatronics
Microtechnology Microelectromechanical systems Electronics Telecommunication Microsystems and MEMS Electronics and Microelectronics, Instrumentation Microwaves, RF Engineering and Optical Communications |
| ISBN | 981-10-5945-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems. |
| Record Nr. | UNINA-9910299932303321 |
| Singapore : , : Springer Nature Singapore : , : Imprint : Springer, , 2018 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||