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Micro mechanical systems : principles and technology / / edited by T. Fukuda and W. Menz
| Micro mechanical systems : principles and technology / / edited by T. Fukuda and W. Menz |
| Pubbl/distr/stampa | Amsterdam ; ; New York, : Elsevier, 1998 |
| Descrizione fisica | 1 online resource (278 p.) |
| Disciplina |
620.11299
621 21 621 |
| Altri autori (Persone) |
FukudaT <1948-> (Toshio)
MenzW (Wolfgang) |
| Collana | Handbook of sensors and actuators |
| Soggetto topico |
Microelectromechanical systems
Microtechnology |
| ISBN |
1-282-28497-5
9786612284977 0-08-053654-9 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Front Cover; Micro Mechanical Systems: Principles and Technology; Copyright Page; Contents; Chapter 1. Introduction; Historical Background and Parallels to Microelectronics; The Motivation for Microsystem Technology; Microphysics and Design Considerations; From the Microcomponent to the Microsystem; Chapter 2. Photolithographic Microfabrication; Basic Concepts of Planar Processing; Materials; Unit Processes; Integrated Processes; Limitations of Planar Processes; Chapter 3. Micromachining by Machine Tools; Historical Aspects; Basics of Micromachine Tools; Microtool Preparation
Wire Electrodischarge Grinding (WEDG)Micro EDM; Micro Mechanical Machining (MMM); Combined Method for Micromachining; Chapter 4. Tribological Aspects of Microsystems; Introduction; Tribology - Friction, Lubrication and Wear; Surface Structure and Tribilogical Contact; Friction and Wear; Materials for Reliable Micromechanical Systems; Chapter 5. Silicon Microsensors; Introduction; Fabrication; Performance of Micromechanical Sensors; Examples of Micromechanical Sensors; Chapter 6. Micro-Actuators for Micro-Robots: Electric and Magnetic; Introduction; Electric Field Driven Actuators Piezoelectric Actuators Mechanical Transformers; Magnetic Field Driven Actuators; Chapter 7. Energy Source and Power Supply Method; Classification of Energy Supply Methods; Internal Supply Methods; External Supply Methods and Noncontact Manipulation; The Others; Chapter 8. Control Method of Micro Mechanical Systems; Control Principle; Scaling Effects; Intelligent Control; Man-Machine Interface; Chapter 9. Examples of Microsystems; Introduction; Examples of Microsystems; Examples of Micromachines; Chapter 10. Future Problems; The Complete Microsystem The Industrial Potential of Microsystem Technology The Importance of Standardization; Outlook |
| Record Nr. | UNINA-9911004757303321 |
| Amsterdam ; ; New York, : Elsevier, 1998 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Systematic organisation of information in fuzzy systems [[electronic resource] /] / edited by Pedro Melo-Pinto, Horia-Nicolai Teodorescu, and Toshio Fukuda
| Systematic organisation of information in fuzzy systems [[electronic resource] /] / edited by Pedro Melo-Pinto, Horia-Nicolai Teodorescu, and Toshio Fukuda |
| Pubbl/distr/stampa | Amsterdam ; ; Washington, DC, : IOS Press/Ohmsha, c2003 |
| Descrizione fisica | viii, 399 p. : ill |
| Disciplina | 006.3 |
| Altri autori (Persone) |
Melo-PintoPedro
TeodorescuHoria-Nicolai FukudaT <1948-> (Toshio) |
| Collana | NATO science series. Series III, Computer and systems sciences |
| Soggetto topico |
Soft computing
Fuzzy systems |
| Soggetto genere / forma | Electronic books. |
| ISBN |
600-00-0570-9
1-280-50574-5 1-60129-463-8 9786610505746 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910455965403321 |
| Amsterdam ; ; Washington, DC, : IOS Press/Ohmsha, c2003 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Systematic organisation of information in fuzzy systems [[electronic resource] /] / edited by Pedro Melo-Pinto, Horia-Nicolai Teodorescu, and Toshio Fukuda
| Systematic organisation of information in fuzzy systems [[electronic resource] /] / edited by Pedro Melo-Pinto, Horia-Nicolai Teodorescu, and Toshio Fukuda |
| Pubbl/distr/stampa | Amsterdam ; ; Washington, DC, : IOS Press/Ohmsha, c2003 |
| Descrizione fisica | viii, 399 p. : ill |
| Disciplina | 006.3 |
| Altri autori (Persone) |
Melo-PintoPedro
TeodorescuHoria-Nicolai FukudaT <1948-> (Toshio) |
| Collana | NATO science series. Series III, Computer and systems sciences |
| Soggetto topico |
Soft computing
Fuzzy systems |
| ISBN |
600-00-0570-9
1-280-50574-5 1-60129-463-8 9786610505746 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910780291403321 |
| Amsterdam ; ; Washington, DC, : IOS Press/Ohmsha, c2003 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||