Scanning Auger electron microscopy [[electronic resource] /] / [edited by] Martin Prutton, Mohamed M. El Gomati |
Pubbl/distr/stampa | Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006 |
Descrizione fisica | 1 online resource (388 p.) |
Disciplina |
502.8/25
502.825 |
Altri autori (Persone) |
PruttonM
El GomatiMohamed M |
Soggetto topico | Scanning Auger electron microscopy |
Soggetto genere / forma | Electronic books. |
ISBN |
1-280-44912-8
9786610449125 0-470-34049-5 0-470-86679-9 0-470-86678-0 |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Nota di contenuto | Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index |
Record Nr. | UNINA-9910143555103321 |
Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
|
Scanning Auger electron microscopy [[electronic resource] /] / [edited by] Martin Prutton, Mohamed M. El Gomati |
Pubbl/distr/stampa | Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006 |
Descrizione fisica | 1 online resource (388 p.) |
Disciplina |
502.8/25
502.825 |
Altri autori (Persone) |
PruttonM
El GomatiMohamed M |
Soggetto topico | Scanning Auger electron microscopy |
ISBN |
1-280-44912-8
9786610449125 0-470-34049-5 0-470-86679-9 0-470-86678-0 |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Nota di contenuto | Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index |
Record Nr. | UNINA-9910830022403321 |
Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
|
Scanning Auger electron microscopy / / [edited by] Martin Prutton, Mohamed M. El Gomati |
Pubbl/distr/stampa | Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006 |
Descrizione fisica | 1 online resource (388 p.) |
Disciplina | 502.8/25 |
Altri autori (Persone) |
PruttonM
El GomatiMohamed M |
Soggetto topico | Scanning Auger electron microscopy |
ISBN |
1-280-44912-8
9786610449125 0-470-34049-5 0-470-86679-9 0-470-86678-0 |
Formato | Materiale a stampa |
Livello bibliografico | Monografia |
Lingua di pubblicazione | eng |
Nota di contenuto | Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index |
Record Nr. | UNINA-9910876766503321 |
Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006 | ||
Materiale a stampa | ||
Lo trovi qui: Univ. Federico II | ||
|