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Scanning Auger electron microscopy [[electronic resource] /] / [edited by] Martin Prutton, Mohamed M. El Gomati
Scanning Auger electron microscopy [[electronic resource] /] / [edited by] Martin Prutton, Mohamed M. El Gomati
Pubbl/distr/stampa Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006
Descrizione fisica 1 online resource (388 p.)
Disciplina 502.8/25
502.825
Altri autori (Persone) PruttonM
El GomatiMohamed M
Soggetto topico Scanning Auger electron microscopy
Soggetto genere / forma Electronic books.
ISBN 1-280-44912-8
9786610449125
0-470-34049-5
0-470-86679-9
0-470-86678-0
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Nota di contenuto Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index
Record Nr. UNINA-9910143555103321
Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui
Scanning Auger electron microscopy [[electronic resource] /] / [edited by] Martin Prutton, Mohamed M. El Gomati
Scanning Auger electron microscopy [[electronic resource] /] / [edited by] Martin Prutton, Mohamed M. El Gomati
Pubbl/distr/stampa Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006
Descrizione fisica 1 online resource (388 p.)
Disciplina 502.8/25
502.825
Altri autori (Persone) PruttonM
El GomatiMohamed M
Soggetto topico Scanning Auger electron microscopy
ISBN 1-280-44912-8
9786610449125
0-470-34049-5
0-470-86679-9
0-470-86678-0
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Nota di contenuto Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index
Record Nr. UNINA-9910830022403321
Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui
Scanning Auger electron microscopy / / [edited by] Martin Prutton, Mohamed M. El Gomati
Scanning Auger electron microscopy / / [edited by] Martin Prutton, Mohamed M. El Gomati
Pubbl/distr/stampa Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006
Descrizione fisica 1 online resource (388 p.)
Disciplina 502.8/25
Altri autori (Persone) PruttonM
El GomatiMohamed M
Soggetto topico Scanning Auger electron microscopy
ISBN 1-280-44912-8
9786610449125
0-470-34049-5
0-470-86679-9
0-470-86678-0
Formato Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione eng
Nota di contenuto Scanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index
Record Nr. UNINA-9910876766503321
Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2006
Materiale a stampa
Lo trovi qui: Univ. Federico II
Opac: Controlla la disponibilità qui