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Ferroelectric dielectrics integrated on silicon [[electronic resource] /] / edited by Emmanuel Defay
| Ferroelectric dielectrics integrated on silicon [[electronic resource] /] / edited by Emmanuel Defay |
| Autore | Defaÿ Emmanuel |
| Edizione | [1st edition] |
| Pubbl/distr/stampa | London, : ISTE Ltd. |
| Descrizione fisica | 1 online resource (464 p.) |
| Disciplina |
621.3815/2
621.38152 |
| Altri autori (Persone) | DefaÿEmmanuel |
| Collana | ISTE |
| Soggetto topico |
Ferroelectric thin films
Silicon - Electric properties Electric batteries - Corrosion |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-118-60275-7
1-118-60276-5 1-118-60280-3 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Cover; Title Page; Copyright Page; Table of Contents; Preface; Chapter 1. The Thermodynamic Approach; 1.1. Background; 1.2. The functions of state; 1.3. Linear equations, piezoelectricity; 1.4. Nonlinear equations, electrostriction; 1.5. Thermodynamic modeling of the ferroelectric-paraelectricphase transition; 1.5.1. Assumption on the elastic Gibbs energy; 1.5.2. Second-order transition; 1.5.3. Effect of stress; 1.5.4. First-order transition; 1.6. Conclusion; 1.7. Bibliography; Chapter 2. Stress Effect on Thin Films; 2.1. Introduction; 2.2. Modeling the system under consideration
2.3. Temperature-misfit strain phase diagrams for monodomain films2.3.1. Phase diagram construction from the Landau-Ginzburg-Devonshire theory; 2.3.2. Calculations limitations; 2.4. Domain stability map; 2.4.1. Presentation and description of the framework of study; 2.4.2. Main contributions to the total energy of a film; 2.4.3. Influence of thickness; 2.4.4. Macroscopic elastic energy for each type of tetragonal domain; 2.4.5. Indirect interaction energy; 2.4.6. Domain structures at equilibrium; 2.4.7. Domain stability map; 2.5. Temperature-misfit strain phase diagram for polydomain films 2.6. Discussion of the nature of the "misfit strain"2.6.1. Mechanical misfit strain; 2.6.2. Thermodynamic misfit strain; 2.6.3. As an illustration; 2.7. Conclusion; 2.8. Experimental validation of phase diagrams: state of the art; 2.9. Case study; 2.10. Results; 2.10.1. Evolution of the lattice parameters; 2.10.2. Associated stresses and strains; 2.11. Comparison between the experimental data and the temperature-misfit strain phase diagrams; 2.11.1. Thin film of PZT; 2.11.2. Thin layer of PbTiO3; 2.12. Conclusion; 2.13. Bibliography; Chapter 3. Deposition and Patterning Technologies 3.1. Deposition method3.1.1. Cathodic sputtering; 3.1.2. Ion beam sputtering; 3.1.3. Pulsed laser deposition; 3.1.4. The sol-gel process; 3.1.5. The MOCVD; 3.1.6. Molecular beam epitaxy; 3.2. Etching; 3.2.1. Wet etching; 3.2.2. Dry etching; 3.3. Contamination; 3.4. Monocrystalline thin-film transfer; 3.4.1. Smart CutTM technology; 3.4.2. Bonding/thinning; 3.4.3. Interest in the material in a thin layer; 3.4.4. State of the art of the domain/applications; 3.4.5. An exemplary implementation; 3.5. Design of experiments; 3.5.1. The assumptions; 3.5.2. Reproducibility 3.5.3. How can we reduce the number of experiments?3.5.4. A DOE example: PZT RF magnetron sputtering deposition; 3.6. Conclusion; 3.7. Bibliography; Chapter 4. Analysis Through X-ray Diffraction of Polycrystalline Thin Films; 4.1. Introduction; 4.2. Some reminders of X-ray diffraction and crystallography; 4.2.1. Nature of X-rays; 4.2.2. X-ray scattering and diffraction; 4.3. Application to powder or polycrystalline thin-films; 4.4. Phase analysis by X-ray diffraction; 4.4.1. Grazing incidence diffraction; 4.4.2. De-texturing; 4.4.3. Quantitative analysis 4.5. Identification of coherent domain sizes of diffraction and micro-strains |
| Record Nr. | UNINA-9910141601203321 |
Defaÿ Emmanuel
|
||
| London, : ISTE Ltd. | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Ferroelectric dielectrics integrated on silicon [[electronic resource] /] / edited by Emmanuel Defay
| Ferroelectric dielectrics integrated on silicon [[electronic resource] /] / edited by Emmanuel Defay |
| Autore | Defaÿ Emmanuel |
| Edizione | [1st edition] |
| Pubbl/distr/stampa | London, : ISTE Ltd. |
| Descrizione fisica | 1 online resource (464 p.) |
| Disciplina |
621.3815/2
621.38152 |
| Altri autori (Persone) | DefaÿEmmanuel |
| Collana | ISTE |
| Soggetto topico |
Ferroelectric thin films
Silicon - Electric properties Electric batteries - Corrosion |
| ISBN |
1-118-60275-7
1-118-60276-5 1-118-60280-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Cover; Title Page; Copyright Page; Table of Contents; Preface; Chapter 1. The Thermodynamic Approach; 1.1. Background; 1.2. The functions of state; 1.3. Linear equations, piezoelectricity; 1.4. Nonlinear equations, electrostriction; 1.5. Thermodynamic modeling of the ferroelectric-paraelectricphase transition; 1.5.1. Assumption on the elastic Gibbs energy; 1.5.2. Second-order transition; 1.5.3. Effect of stress; 1.5.4. First-order transition; 1.6. Conclusion; 1.7. Bibliography; Chapter 2. Stress Effect on Thin Films; 2.1. Introduction; 2.2. Modeling the system under consideration
2.3. Temperature-misfit strain phase diagrams for monodomain films2.3.1. Phase diagram construction from the Landau-Ginzburg-Devonshire theory; 2.3.2. Calculations limitations; 2.4. Domain stability map; 2.4.1. Presentation and description of the framework of study; 2.4.2. Main contributions to the total energy of a film; 2.4.3. Influence of thickness; 2.4.4. Macroscopic elastic energy for each type of tetragonal domain; 2.4.5. Indirect interaction energy; 2.4.6. Domain structures at equilibrium; 2.4.7. Domain stability map; 2.5. Temperature-misfit strain phase diagram for polydomain films 2.6. Discussion of the nature of the "misfit strain"2.6.1. Mechanical misfit strain; 2.6.2. Thermodynamic misfit strain; 2.6.3. As an illustration; 2.7. Conclusion; 2.8. Experimental validation of phase diagrams: state of the art; 2.9. Case study; 2.10. Results; 2.10.1. Evolution of the lattice parameters; 2.10.2. Associated stresses and strains; 2.11. Comparison between the experimental data and the temperature-misfit strain phase diagrams; 2.11.1. Thin film of PZT; 2.11.2. Thin layer of PbTiO3; 2.12. Conclusion; 2.13. Bibliography; Chapter 3. Deposition and Patterning Technologies 3.1. Deposition method3.1.1. Cathodic sputtering; 3.1.2. Ion beam sputtering; 3.1.3. Pulsed laser deposition; 3.1.4. The sol-gel process; 3.1.5. The MOCVD; 3.1.6. Molecular beam epitaxy; 3.2. Etching; 3.2.1. Wet etching; 3.2.2. Dry etching; 3.3. Contamination; 3.4. Monocrystalline thin-film transfer; 3.4.1. Smart CutTM technology; 3.4.2. Bonding/thinning; 3.4.3. Interest in the material in a thin layer; 3.4.4. State of the art of the domain/applications; 3.4.5. An exemplary implementation; 3.5. Design of experiments; 3.5.1. The assumptions; 3.5.2. Reproducibility 3.5.3. How can we reduce the number of experiments?3.5.4. A DOE example: PZT RF magnetron sputtering deposition; 3.6. Conclusion; 3.7. Bibliography; Chapter 4. Analysis Through X-ray Diffraction of Polycrystalline Thin Films; 4.1. Introduction; 4.2. Some reminders of X-ray diffraction and crystallography; 4.2.1. Nature of X-rays; 4.2.2. X-ray scattering and diffraction; 4.3. Application to powder or polycrystalline thin-films; 4.4. Phase analysis by X-ray diffraction; 4.4.1. Grazing incidence diffraction; 4.4.2. De-texturing; 4.4.3. Quantitative analysis 4.5. Identification of coherent domain sizes of diffraction and micro-strains |
| Record Nr. | UNINA-9910830439703321 |
|
Defaÿ Emmanuel
|
||
| London, : ISTE Ltd. | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Integration of ferroelectric and piezoelectric thin films [[electronic resource] ] : concepts and applications for microsystems / / edited by Emmanuel Defaÿ
| Integration of ferroelectric and piezoelectric thin films [[electronic resource] ] : concepts and applications for microsystems / / edited by Emmanuel Defaÿ |
| Pubbl/distr/stampa | London, : ISTE |
| Descrizione fisica | 1 online resource (424 p.) |
| Disciplina |
621.3815
621.38152 |
| Altri autori (Persone) | DefaÿEmmanuel |
| Collana | ISTE |
| Soggetto topico |
Piezoelectric devices - Materials
Ferroelectric thin films Miniature electronic equipment - Materials |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-118-61663-4
1-299-31420-1 1-118-61675-8 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Dielectric, piezoelectric, pyroelectric, and ferroelectric -- Thermodynamic study : a structuring approach -- Ferroelectric-paraelectric phase transition thermodynamic modelling -- Mechanical formalism -- Dielectric formalism -- Piezoelectric formalism -- Acoustic formalism -- Electrostrictive formalism -- Electric characterization -- Piezoelectric resonators and filters -- High overtone bulk acoustic resonator (HBAR) -- Electrostrictive resonators -- Thin film piezoelectric transducers. |
| Record Nr. | UNINA-9910139056703321 |
| London, : ISTE | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Integration of ferroelectric and piezoelectric thin films [[electronic resource] ] : concepts and applications for microsystems / / edited by Emmanuel Defaÿ
| Integration of ferroelectric and piezoelectric thin films [[electronic resource] ] : concepts and applications for microsystems / / edited by Emmanuel Defaÿ |
| Pubbl/distr/stampa | London, : ISTE |
| Descrizione fisica | 1 online resource (424 p.) |
| Disciplina |
621.3815
621.38152 |
| Altri autori (Persone) | DefaÿEmmanuel |
| Collana | ISTE |
| Soggetto topico |
Piezoelectric devices - Materials
Ferroelectric thin films Miniature electronic equipment - Materials |
| ISBN |
1-118-61663-4
1-299-31420-1 1-118-61675-8 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Dielectric, piezoelectric, pyroelectric, and ferroelectric -- Thermodynamic study : a structuring approach -- Ferroelectric-paraelectric phase transition thermodynamic modelling -- Mechanical formalism -- Dielectric formalism -- Piezoelectric formalism -- Acoustic formalism -- Electrostrictive formalism -- Electric characterization -- Piezoelectric resonators and filters -- High overtone bulk acoustic resonator (HBAR) -- Electrostrictive resonators -- Thin film piezoelectric transducers. |
| Record Nr. | UNINA-9910830083603321 |
| London, : ISTE | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||