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Measurement assurance for dimensional measurements on integrated-circuit photomasks / / Carroll. Croarkin
| Measurement assurance for dimensional measurements on integrated-circuit photomasks / / Carroll. Croarkin |
| Autore | Croarkin Carroll |
| Pubbl/distr/stampa | Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1982 |
| Descrizione fisica | 1 online resource |
| Altri autori (Persone) | CroarkinCarroll |
| Collana | NBS technical note |
| Soggetto topico |
Integrated circuits - Masks - Measurement
Optical instruments - Calibration |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910711225803321 |
Croarkin Carroll
|
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| Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1982 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Measurement assurance for gage blocks / / Carroll Croarkin, John Beers, and Clyde Tucker ; with an introd. by J.M. Cameron
| Measurement assurance for gage blocks / / Carroll Croarkin, John Beers, and Clyde Tucker ; with an introd. by J.M. Cameron |
| Autore | Croarkin Carroll |
| Pubbl/distr/stampa | Washington : , : U.S. Dept. of Commerce, National Bureau of Standards : , : For sale by the Supt. of Docs., U.S. Govt. Print. Off., , 1979 |
| Descrizione fisica | 1 online resource (v, 75 pages) : illustrations |
| Disciplina |
602/.1 s
621.9/94 |
| Collana | NBS monograph |
| Soggetto topico |
Gage blocks - Calibration
Cales- etalons - Etalonnage |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Record Nr. | UNINA-9910712905303321 |
|
Croarkin Carroll
|
||
| Washington : , : U.S. Dept. of Commerce, National Bureau of Standards : , : For sale by the Supt. of Docs., U.S. Govt. Print. Off., , 1979 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||