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Scaling issues and design of MEMS [[electronic resource] /] / Salvatore Baglio, Salvatore Castorina, Nicolò Savalli
| Scaling issues and design of MEMS [[electronic resource] /] / Salvatore Baglio, Salvatore Castorina, Nicolò Savalli |
| Autore | Baglio S (Salvatore) |
| Pubbl/distr/stampa | Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2007 |
| Descrizione fisica | 1 online resource (245 p.) |
| Disciplina |
620/.5
621.381 |
| Altri autori (Persone) |
CastorinaSalvatore
SavalliNicolò |
| Soggetto topico | Microelectromechanical systems - Design and construction |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-281-83143-3
9786611831431 0-470-03407-6 0-470-03408-4 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Scaling Issues and Design of MEMS; Contents; Preface; Introduction; 1 Scaling of MEMS; 1.1 Introduction to Scaling Issues; 1.2 Examples of Dimensional Scaling Potentials; 1.2.1 Scaling effects on a cantilever beam; 1.2.2 Scaling of electrostatic actuators; 1.2.3 Scaling of thermal actuators; 1.3 Motivation, Fabrication and Scaling of MEMS; 1.4 Scaling as a Methodological Approach; References; 2 Scaling of Microactuators - an Overview; 2.1 Electrostatic Actuators; 2.1.1 Transverse combs modelling; 2.1.2 Lateral combs modelling; 2.2 Magnetic Transducers; 2.2.1 Magnetic actuators
2.2.2 Ferromagnetic transducers2.3 Thermal Actuators; 2.3.1 Thermomechanical actuators; Acknowledgements; References; 3 Scaling of Thermal Sensors; 3.1 Thermoelectric Sensors; 3.2 Application: Dew-Point Relative Humidity Sensors; 3.2.1 Device structures and operating principles; 3.2.2 Device modelling and simulations; 3.2.3 Device design; 3.3 Conclusions; Acknowledgements; References; 4 Inductive Sensors for Magnetic Fields; 4.1 Inductive Microsensors for Magnetic Particles; 4.1.1 Integrated inductive sensors; 4.1.2 Planar differential transformer; 4.1.3 Signal-conditioning circuits 4.1.4 Simulation of the planar differential transformer4.1.5 Experimental results; 4.2 Magnetic Immunoassay Systems; Acknowledgements; References; 5 Scaling of Mechanical Sensors; 5.1 Introduction; 5.2 Device Modelling and Fabrication Processes; 5.2.1 Fabrication processes; 5.2.2 Devices modelling; 5.2.3 Accelerometers; 5.2.4 Resonant mass sensors; 5.3 Experimental Device Prototypes; 5.3.1 CMOS devices; 5.3.2 SOI devices; 5.3.3 Finite element modelling; 5.4 Scaling Issues on Microaccelerometers and Mass Sensors; 5.5 Some Experimental Results; 5.6 Vibrating Microgyroscopes 5.6.1 Coupled vibratory gyroscopesAcknowledgements; References; 6 Scaling of Energy Sources; 6.1 Introduction; 6.2 Energy Supply Strategies for Autonomous Microsystems; 6.2.1 Use of microlenses in photothermomechanical actuation; 6.2.2 Technologies, materials and design of photothermomechanical actuators; 6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems; 6.3.1 Photothermoelectric power generation; 6.4 Efficiency of the Combined Energy Supply Strategy; References 7 Technologies and Architectures for Autonomous MEMS Microrobots7.1 Design Issues in Microrobots; 7.2 A Microrobot Architecture Based on Photothermal Strategy; 7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems; References; 8 Moving towards the Nanoscale; 8.1 Semiconductor-Based Nano-Electromechanical Systems; 8.2 Nanofabrication Facilities; 8.3 Overview of Nanosensors; 8.3.1 Use of AFM for materials and nanodevices characterization; 8.3.2 Scanning thermal microscopy (SThM); 8.3.3 Scanning Hall probe microscopy 8.3.4 Mechanical resonant immunospecific biological detector |
| Record Nr. | UNINA-9910144111803321 |
Baglio S (Salvatore)
|
||
| Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2007 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Scaling issues and design of MEMS [[electronic resource] /] / Salvatore Baglio, Salvatore Castorina, Nicolò Savalli
| Scaling issues and design of MEMS [[electronic resource] /] / Salvatore Baglio, Salvatore Castorina, Nicolò Savalli |
| Autore | Baglio S (Salvatore) |
| Pubbl/distr/stampa | Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2007 |
| Descrizione fisica | 1 online resource (245 p.) |
| Disciplina |
620/.5
621.381 |
| Altri autori (Persone) |
CastorinaSalvatore
SavalliNicolò |
| Soggetto topico | Microelectromechanical systems - Design and construction |
| ISBN |
1-281-83143-3
9786611831431 0-470-03407-6 0-470-03408-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Scaling Issues and Design of MEMS; Contents; Preface; Introduction; 1 Scaling of MEMS; 1.1 Introduction to Scaling Issues; 1.2 Examples of Dimensional Scaling Potentials; 1.2.1 Scaling effects on a cantilever beam; 1.2.2 Scaling of electrostatic actuators; 1.2.3 Scaling of thermal actuators; 1.3 Motivation, Fabrication and Scaling of MEMS; 1.4 Scaling as a Methodological Approach; References; 2 Scaling of Microactuators - an Overview; 2.1 Electrostatic Actuators; 2.1.1 Transverse combs modelling; 2.1.2 Lateral combs modelling; 2.2 Magnetic Transducers; 2.2.1 Magnetic actuators
2.2.2 Ferromagnetic transducers2.3 Thermal Actuators; 2.3.1 Thermomechanical actuators; Acknowledgements; References; 3 Scaling of Thermal Sensors; 3.1 Thermoelectric Sensors; 3.2 Application: Dew-Point Relative Humidity Sensors; 3.2.1 Device structures and operating principles; 3.2.2 Device modelling and simulations; 3.2.3 Device design; 3.3 Conclusions; Acknowledgements; References; 4 Inductive Sensors for Magnetic Fields; 4.1 Inductive Microsensors for Magnetic Particles; 4.1.1 Integrated inductive sensors; 4.1.2 Planar differential transformer; 4.1.3 Signal-conditioning circuits 4.1.4 Simulation of the planar differential transformer4.1.5 Experimental results; 4.2 Magnetic Immunoassay Systems; Acknowledgements; References; 5 Scaling of Mechanical Sensors; 5.1 Introduction; 5.2 Device Modelling and Fabrication Processes; 5.2.1 Fabrication processes; 5.2.2 Devices modelling; 5.2.3 Accelerometers; 5.2.4 Resonant mass sensors; 5.3 Experimental Device Prototypes; 5.3.1 CMOS devices; 5.3.2 SOI devices; 5.3.3 Finite element modelling; 5.4 Scaling Issues on Microaccelerometers and Mass Sensors; 5.5 Some Experimental Results; 5.6 Vibrating Microgyroscopes 5.6.1 Coupled vibratory gyroscopesAcknowledgements; References; 6 Scaling of Energy Sources; 6.1 Introduction; 6.2 Energy Supply Strategies for Autonomous Microsystems; 6.2.1 Use of microlenses in photothermomechanical actuation; 6.2.2 Technologies, materials and design of photothermomechanical actuators; 6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems; 6.3.1 Photothermoelectric power generation; 6.4 Efficiency of the Combined Energy Supply Strategy; References 7 Technologies and Architectures for Autonomous MEMS Microrobots7.1 Design Issues in Microrobots; 7.2 A Microrobot Architecture Based on Photothermal Strategy; 7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems; References; 8 Moving towards the Nanoscale; 8.1 Semiconductor-Based Nano-Electromechanical Systems; 8.2 Nanofabrication Facilities; 8.3 Overview of Nanosensors; 8.3.1 Use of AFM for materials and nanodevices characterization; 8.3.2 Scanning thermal microscopy (SThM); 8.3.3 Scanning Hall probe microscopy 8.3.4 Mechanical resonant immunospecific biological detector |
| Record Nr. | UNINA-9910829968703321 |
|
Baglio S (Salvatore)
|
||
| Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2007 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
Scaling issues and design of MEMS / / Salvatore Baglio, Salvatore Castorina, Nicolo Savalli
| Scaling issues and design of MEMS / / Salvatore Baglio, Salvatore Castorina, Nicolo Savalli |
| Autore | Baglio S (Salvatore) |
| Pubbl/distr/stampa | Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2007 |
| Descrizione fisica | 1 online resource (245 p.) |
| Disciplina | 620/.5 |
| Altri autori (Persone) |
CastorinaSalvatore
SavalliNicolo |
| Soggetto topico | Microelectromechanical systems - Design and construction |
| ISBN |
9786611831431
9781281831439 1281831433 9780470034071 0470034076 9780470034088 0470034084 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
Scaling Issues and Design of MEMS; Contents; Preface; Introduction; 1 Scaling of MEMS; 1.1 Introduction to Scaling Issues; 1.2 Examples of Dimensional Scaling Potentials; 1.2.1 Scaling effects on a cantilever beam; 1.2.2 Scaling of electrostatic actuators; 1.2.3 Scaling of thermal actuators; 1.3 Motivation, Fabrication and Scaling of MEMS; 1.4 Scaling as a Methodological Approach; References; 2 Scaling of Microactuators - an Overview; 2.1 Electrostatic Actuators; 2.1.1 Transverse combs modelling; 2.1.2 Lateral combs modelling; 2.2 Magnetic Transducers; 2.2.1 Magnetic actuators
2.2.2 Ferromagnetic transducers2.3 Thermal Actuators; 2.3.1 Thermomechanical actuators; Acknowledgements; References; 3 Scaling of Thermal Sensors; 3.1 Thermoelectric Sensors; 3.2 Application: Dew-Point Relative Humidity Sensors; 3.2.1 Device structures and operating principles; 3.2.2 Device modelling and simulations; 3.2.3 Device design; 3.3 Conclusions; Acknowledgements; References; 4 Inductive Sensors for Magnetic Fields; 4.1 Inductive Microsensors for Magnetic Particles; 4.1.1 Integrated inductive sensors; 4.1.2 Planar differential transformer; 4.1.3 Signal-conditioning circuits 4.1.4 Simulation of the planar differential transformer4.1.5 Experimental results; 4.2 Magnetic Immunoassay Systems; Acknowledgements; References; 5 Scaling of Mechanical Sensors; 5.1 Introduction; 5.2 Device Modelling and Fabrication Processes; 5.2.1 Fabrication processes; 5.2.2 Devices modelling; 5.2.3 Accelerometers; 5.2.4 Resonant mass sensors; 5.3 Experimental Device Prototypes; 5.3.1 CMOS devices; 5.3.2 SOI devices; 5.3.3 Finite element modelling; 5.4 Scaling Issues on Microaccelerometers and Mass Sensors; 5.5 Some Experimental Results; 5.6 Vibrating Microgyroscopes 5.6.1 Coupled vibratory gyroscopesAcknowledgements; References; 6 Scaling of Energy Sources; 6.1 Introduction; 6.2 Energy Supply Strategies for Autonomous Microsystems; 6.2.1 Use of microlenses in photothermomechanical actuation; 6.2.2 Technologies, materials and design of photothermomechanical actuators; 6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems; 6.3.1 Photothermoelectric power generation; 6.4 Efficiency of the Combined Energy Supply Strategy; References 7 Technologies and Architectures for Autonomous MEMS Microrobots7.1 Design Issues in Microrobots; 7.2 A Microrobot Architecture Based on Photothermal Strategy; 7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems; References; 8 Moving towards the Nanoscale; 8.1 Semiconductor-Based Nano-Electromechanical Systems; 8.2 Nanofabrication Facilities; 8.3 Overview of Nanosensors; 8.3.1 Use of AFM for materials and nanodevices characterization; 8.3.2 Scanning thermal microscopy (SThM); 8.3.3 Scanning Hall probe microscopy 8.3.4 Mechanical resonant immunospecific biological detector |
| Altri titoli varianti | Scaling issues and design of microelectromechanical systems |
| Record Nr. | UNINA-9911019242203321 |
|
Baglio S (Salvatore)
|
||
| Chichester, West Sussex, England ; ; Hoboken, NJ, : John Wiley & Sons, c2007 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||