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A practical guide to optical metrology for thin films [[electronic resource] /] / Michael Quinten
| A practical guide to optical metrology for thin films [[electronic resource] /] / Michael Quinten |
| Autore | Quinten Michael |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, c2013 |
| Descrizione fisica | 1 online resource (225 p.) |
| Disciplina | 530.42750287 |
| Soggetto topico |
Thin films - Optical properties
Thin films - Measurement Optical measurements |
| Soggetto genere / forma | Electronic books. |
| ISBN |
1-299-47599-X
3-527-66437-8 3-527-66434-3 3-527-66435-1 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
A Practical Guide to Optical Metrology for Thin Films; Contents; Preface; 1 Introduction; 2 Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.5.1 Transmission Gratings; 2.5.1.1 Lamellar Transmission Gratings; 2.5.1.2 Holographic Transmission Gratings; 2.5.2 Reflection Gratings; 2.5.2.1 Lamellar Reflection Gratings; 2.5.2.2 Blazed Gratings; 2.5.2.3 Holographic Gratings; 2.6 Scattering
2.7 Dielectric Function and Refractive Index2.7.1 Models for the Dielectric Function; 2.7.2 Kramers-Kronig Analysis of Dielectric Functions; 2.7.3 Empiric Formulas for the Refractive Index; 2.7.4 EMA Models; 3 Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.1.1 Coherent Superposition of Reflected Light; 3.1.2 Influence of Absorption on the Layer; 3.1.3 Partial Incoherence due to Thick Substrates; 3.1.4 Partial Incoherence due to Roughness; 3.1.5 Coherent Superposition of Transmitted Light 3.2 Propagating Wave Model for a Layer Stack3.2.1 Coherent Reflectance and Transmittance of a Layer Stack; 3.2.2 Consideration of Incoherent Substrates; 3.2.3 Consideration of Surface Roughness; 3.2.4 r-t-ø Model for a Layer Stack; 4 The Optical Measurement; 4.1 Spectral Reflectance and Transmittance Measurement; 4.2 Ellipsometric Measurement; 4.3 Other Optical Methods; 4.3.1 Prism Coupling; 4.3.2 Chromatic Thickness Determination; 4.4 Components for the Optical Measurement; 4.4.1 Light Sources; 4.4.1.1 Halogen Lamps; 4.4.1.2 White Light LED; 4.4.1.3 Superluminescence Diodes 4.4.1.4 Xenon High-Pressure Arc Lamps4.4.1.5 Deuterium Lamps; 4.4.2 Optical Components; 4.4.2.1 Lenses and Mirrors; 4.4.2.2 Polarizers and Analyzers; 4.4.2.3 Optical Retarders; 4.4.3 Optical Fibers; 4.4.4 Miniaturized Spectrometers; 4.4.4.1 Gratings; 4.4.4.2 Detectors; 4.4.4.3 System Properties; 5 Thin-Film Thickness Determination; 5.1 Fast Fourier Transform; 5.1.1 Single Layer; 5.1.2 Layer Stack; 5.1.3 Accuracy, Resolution, Repeatability, and Reproducibility; 5.2 Regression Analysis with χ2-Test; 5.2.1 Method of Thickness Determination 5.2.2 Accuracy, Resolution, Repeatability, and Reproducibility6 The Color of Thin Films; 7 Applications; 7.1 High-Reflection and Antireflection Coatings; 7.1.1 HR Coatings on Metallic Mirrors; 7.1.2 AR Coatings on Glass; 7.1.3 AR Coatings on Solar Wafers; 7.2 Thin Single- and Double-Layer Coatings; 7.2.1 SiO2 on Silicon Wafers; 7.2.2 Si3N4 Hardcoat; 7.2.3 Double-Layer System; 7.2.4 Porous Silicon on Silicon; 7.3 Photoresists and Photolithographic Structuring; 7.4 Thickness of Wafers and Transparent Plastic Films; 7.4.1 Thickness of Semiconductor, Glass, and Sapphire Wafers 7.4.2 Thickness of Transparent Plastic Films |
| Record Nr. | UNINA-9910141393003321 |
Quinten Michael
|
||
| Weinheim, : Wiley-VCH, c2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
A practical guide to optical metrology for thin films [[electronic resource] /] / Michael Quinten
| A practical guide to optical metrology for thin films [[electronic resource] /] / Michael Quinten |
| Autore | Quinten Michael |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, c2013 |
| Descrizione fisica | 1 online resource (225 p.) |
| Disciplina | 530.42750287 |
| Soggetto topico |
Thin films - Optical properties
Thin films - Measurement Optical measurements |
| ISBN |
1-299-47599-X
3-527-66437-8 3-527-66434-3 3-527-66435-1 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
A Practical Guide to Optical Metrology for Thin Films; Contents; Preface; 1 Introduction; 2 Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.5.1 Transmission Gratings; 2.5.1.1 Lamellar Transmission Gratings; 2.5.1.2 Holographic Transmission Gratings; 2.5.2 Reflection Gratings; 2.5.2.1 Lamellar Reflection Gratings; 2.5.2.2 Blazed Gratings; 2.5.2.3 Holographic Gratings; 2.6 Scattering
2.7 Dielectric Function and Refractive Index2.7.1 Models for the Dielectric Function; 2.7.2 Kramers-Kronig Analysis of Dielectric Functions; 2.7.3 Empiric Formulas for the Refractive Index; 2.7.4 EMA Models; 3 Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.1.1 Coherent Superposition of Reflected Light; 3.1.2 Influence of Absorption on the Layer; 3.1.3 Partial Incoherence due to Thick Substrates; 3.1.4 Partial Incoherence due to Roughness; 3.1.5 Coherent Superposition of Transmitted Light 3.2 Propagating Wave Model for a Layer Stack3.2.1 Coherent Reflectance and Transmittance of a Layer Stack; 3.2.2 Consideration of Incoherent Substrates; 3.2.3 Consideration of Surface Roughness; 3.2.4 r-t-ø Model for a Layer Stack; 4 The Optical Measurement; 4.1 Spectral Reflectance and Transmittance Measurement; 4.2 Ellipsometric Measurement; 4.3 Other Optical Methods; 4.3.1 Prism Coupling; 4.3.2 Chromatic Thickness Determination; 4.4 Components for the Optical Measurement; 4.4.1 Light Sources; 4.4.1.1 Halogen Lamps; 4.4.1.2 White Light LED; 4.4.1.3 Superluminescence Diodes 4.4.1.4 Xenon High-Pressure Arc Lamps4.4.1.5 Deuterium Lamps; 4.4.2 Optical Components; 4.4.2.1 Lenses and Mirrors; 4.4.2.2 Polarizers and Analyzers; 4.4.2.3 Optical Retarders; 4.4.3 Optical Fibers; 4.4.4 Miniaturized Spectrometers; 4.4.4.1 Gratings; 4.4.4.2 Detectors; 4.4.4.3 System Properties; 5 Thin-Film Thickness Determination; 5.1 Fast Fourier Transform; 5.1.1 Single Layer; 5.1.2 Layer Stack; 5.1.3 Accuracy, Resolution, Repeatability, and Reproducibility; 5.2 Regression Analysis with χ2-Test; 5.2.1 Method of Thickness Determination 5.2.2 Accuracy, Resolution, Repeatability, and Reproducibility6 The Color of Thin Films; 7 Applications; 7.1 High-Reflection and Antireflection Coatings; 7.1.1 HR Coatings on Metallic Mirrors; 7.1.2 AR Coatings on Glass; 7.1.3 AR Coatings on Solar Wafers; 7.2 Thin Single- and Double-Layer Coatings; 7.2.1 SiO2 on Silicon Wafers; 7.2.2 Si3N4 Hardcoat; 7.2.3 Double-Layer System; 7.2.4 Porous Silicon on Silicon; 7.3 Photoresists and Photolithographic Structuring; 7.4 Thickness of Wafers and Transparent Plastic Films; 7.4.1 Thickness of Semiconductor, Glass, and Sapphire Wafers 7.4.2 Thickness of Transparent Plastic Films |
| Record Nr. | UNINA-9910830321103321 |
|
Quinten Michael
|
||
| Weinheim, : Wiley-VCH, c2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
A practical guide to optical metrology for thin films [[electronic resource] /] / Michael Quinten
| A practical guide to optical metrology for thin films [[electronic resource] /] / Michael Quinten |
| Autore | Quinten Michael |
| Pubbl/distr/stampa | Weinheim, : Wiley-VCH, c2013 |
| Descrizione fisica | 1 online resource (225 p.) |
| Disciplina | 530.42750287 |
| Soggetto topico |
Thin films - Optical properties
Thin films - Measurement Optical measurements |
| ISBN |
1-299-47599-X
3-527-66437-8 3-527-66434-3 3-527-66435-1 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto |
A Practical Guide to Optical Metrology for Thin Films; Contents; Preface; 1 Introduction; 2 Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.5.1 Transmission Gratings; 2.5.1.1 Lamellar Transmission Gratings; 2.5.1.2 Holographic Transmission Gratings; 2.5.2 Reflection Gratings; 2.5.2.1 Lamellar Reflection Gratings; 2.5.2.2 Blazed Gratings; 2.5.2.3 Holographic Gratings; 2.6 Scattering
2.7 Dielectric Function and Refractive Index2.7.1 Models for the Dielectric Function; 2.7.2 Kramers-Kronig Analysis of Dielectric Functions; 2.7.3 Empiric Formulas for the Refractive Index; 2.7.4 EMA Models; 3 Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.1.1 Coherent Superposition of Reflected Light; 3.1.2 Influence of Absorption on the Layer; 3.1.3 Partial Incoherence due to Thick Substrates; 3.1.4 Partial Incoherence due to Roughness; 3.1.5 Coherent Superposition of Transmitted Light 3.2 Propagating Wave Model for a Layer Stack3.2.1 Coherent Reflectance and Transmittance of a Layer Stack; 3.2.2 Consideration of Incoherent Substrates; 3.2.3 Consideration of Surface Roughness; 3.2.4 r-t-ø Model for a Layer Stack; 4 The Optical Measurement; 4.1 Spectral Reflectance and Transmittance Measurement; 4.2 Ellipsometric Measurement; 4.3 Other Optical Methods; 4.3.1 Prism Coupling; 4.3.2 Chromatic Thickness Determination; 4.4 Components for the Optical Measurement; 4.4.1 Light Sources; 4.4.1.1 Halogen Lamps; 4.4.1.2 White Light LED; 4.4.1.3 Superluminescence Diodes 4.4.1.4 Xenon High-Pressure Arc Lamps4.4.1.5 Deuterium Lamps; 4.4.2 Optical Components; 4.4.2.1 Lenses and Mirrors; 4.4.2.2 Polarizers and Analyzers; 4.4.2.3 Optical Retarders; 4.4.3 Optical Fibers; 4.4.4 Miniaturized Spectrometers; 4.4.4.1 Gratings; 4.4.4.2 Detectors; 4.4.4.3 System Properties; 5 Thin-Film Thickness Determination; 5.1 Fast Fourier Transform; 5.1.1 Single Layer; 5.1.2 Layer Stack; 5.1.3 Accuracy, Resolution, Repeatability, and Reproducibility; 5.2 Regression Analysis with χ2-Test; 5.2.1 Method of Thickness Determination 5.2.2 Accuracy, Resolution, Repeatability, and Reproducibility6 The Color of Thin Films; 7 Applications; 7.1 High-Reflection and Antireflection Coatings; 7.1.1 HR Coatings on Metallic Mirrors; 7.1.2 AR Coatings on Glass; 7.1.3 AR Coatings on Solar Wafers; 7.2 Thin Single- and Double-Layer Coatings; 7.2.1 SiO2 on Silicon Wafers; 7.2.2 Si3N4 Hardcoat; 7.2.3 Double-Layer System; 7.2.4 Porous Silicon on Silicon; 7.3 Photoresists and Photolithographic Structuring; 7.4 Thickness of Wafers and Transparent Plastic Films; 7.4.1 Thickness of Semiconductor, Glass, and Sapphire Wafers 7.4.2 Thickness of Transparent Plastic Films |
| Record Nr. | UNINA-9910840711403321 |
|
Quinten Michael
|
||
| Weinheim, : Wiley-VCH, c2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
| ||
