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Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System [[electronic resource] /] / by Seiji Samukawa
| Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System [[electronic resource] /] / by Seiji Samukawa |
| Autore | Samukawa Seiji |
| Edizione | [1st ed. 2014.] |
| Pubbl/distr/stampa | Tokyo : , : Springer Japan : , : Imprint : Springer, , 2014 |
| Descrizione fisica | 1 online resource (46 p.) |
| Disciplina | 621.044 |
| Collana | SpringerBriefs in Applied Sciences and Technology |
| Soggetto topico |
Nanotechnology
Nanoscale science Nanoscience Nanostructures Plasma (Ionized gases) Semiconductors Nanotechnology and Microengineering Nanoscale Science and Technology Plasma Physics |
| ISBN | 4-431-54795-9 |
| Formato | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Introduction -- On-wafer UV sensor and prediction of UV irradiation damage -- Prediction of Abnormal Etching Profiles in High-aspect-ratio Via/Hole Etching Using On-wafer Monitoring System -- Feature Profile Evolution in Plasma Processing Using Wireless On-wafer Monitoring System. |
| Record Nr. | UNINA-9910299730203321 |
Samukawa Seiji
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| Tokyo : , : Springer Japan : , : Imprint : Springer, , 2014 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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First Ten Years of Hinode Solar On-Orbit Observatory [[electronic resource] /] / edited by Toshifumi Shimizu, Shinsuke Imada, Masahito Kubo
| First Ten Years of Hinode Solar On-Orbit Observatory [[electronic resource] /] / edited by Toshifumi Shimizu, Shinsuke Imada, Masahito Kubo |
| Edizione | [1st ed. 2018.] |
| Pubbl/distr/stampa | Singapore : , : Springer Singapore : , : Imprint : Springer, , 2018 |
| Descrizione fisica | 1 online resource (309 pages) |
| Disciplina | 523.7 |
| Collana | Astrophysics and Space Science Library |
| Soggetto topico |
Solar system
Observations, Astronomical Astronomy—Observations Space sciences Plasma (Ionized gases) Solar and Heliospheric Physics Astronomy, Observations and Techniques Space Sciences (including Extraterrestrial Physics, Space Exploration and Astronautics) Plasma Physics |
| ISBN | 981-10-7742-8 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | A Brief History of Hinode – Toward the Success in Orbit -- Hinode's Contributions to Solar Physics -- Ten-Year Results of Solar Optical Telescope (SOT) Onboard Hinode -- X-ray Telescope (XRT) aboard Hinode: Key instrumental features and scientific highlights -- Solar Extreme Ultraviolet Spectroscopy: zur NachEISzeit -- Coronal Heating: issues revealed from Hinode observations -- Importance of MHD Waves Observed with Hinode -- Hinode Investigations of Microflares and Nanoflares -- The Origin of the Solar Wind -- New Insights into Sunspots through Hinode Observations -- Three-Dimensional Coronal Magnetic Field Based on the Photospheric Magnetic Field by Hinode/SP Observation -- New Approach to Solar Flare Trigger Process with Hinode/Solar Optical Telescope -- Hinode Observations of Flows and Heating Associated with Magnetic Reconnection during Solar Flares -- The First Decade of Hinode: Understanding Coronal Mass Ejections -- Understanding Magneto-Convection on Solar Surface with Hinode Satellite Observation -- Hinode Observation of the Sun's Polar Magnetic Field and Solar Cycle Variation -- Local Helioseismology Analyses with Hinode/SOT Datasets -- Penumbral Microjets in Sunspot Chromospheres: Evidence of Magnetic Reconnection -- Physics of Partial Ionization in the Solar Chromosphere Revealed by the Solar Optical Telescope on board Hinode -- Thermal Non-equilibrium Plasma Observed by Hinode -- From Hinode to the Next-Generation Solar Observation Missions -- Hinode Science Center at NAOJ - from the preparations of the establishment to the issues for the future -- Public Outreach and Education Activities of Solar Mission Hinode in Japan. |
| Record Nr. | UNINA-9910300535403321 |
| Singapore : , : Springer Singapore : , : Imprint : Springer, , 2018 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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The Formation and Disruption of Black Hole Jets [[electronic resource] /] / edited by Ioannis Contopoulos, Denise Gabuzda, Nikolaos Kylafis
| The Formation and Disruption of Black Hole Jets [[electronic resource] /] / edited by Ioannis Contopoulos, Denise Gabuzda, Nikolaos Kylafis |
| Edizione | [1st ed. 2015.] |
| Pubbl/distr/stampa | Cham : , : Springer International Publishing : , : Imprint : Springer, , 2015 |
| Descrizione fisica | 1 online resource (273 p.) |
| Disciplina | 523.8875 |
| Collana | Astrophysics and Space Science Library |
| Soggetto topico |
Astrophysics
Observations, Astronomical Astronomy—Observations Gravitation Plasma (Ionized gases) Astrophysics and Astroparticles Astronomy, Observations and Techniques Classical and Quantum Gravitation, Relativity Theory Plasma Physics |
| ISBN | 3-319-10356-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Relativistic jets in stellar systems -- Launching of AGN jets -- Parsec-scale AGN jets -- Kiloparsec-scale AGN jets -- Black hole magnetospheres -- Theory of relativistic jets -- The structure and dynamics of the inner accretion disk -- The origin of the jet magnetic filed: a Cosmic Battery -- X-ray observations, phenomenology, and connection with theory. |
| Record Nr. | UNINA-9910300417603321 |
| Cham : , : Springer International Publishing : , : Imprint : Springer, , 2015 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Fractional Dynamics, Anomalous Transport and Plasma Science [[electronic resource] ] : Lectures from CHAOS2017 / / edited by Christos H. Skiadas
| Fractional Dynamics, Anomalous Transport and Plasma Science [[electronic resource] ] : Lectures from CHAOS2017 / / edited by Christos H. Skiadas |
| Edizione | [1st ed. 2018.] |
| Pubbl/distr/stampa | Cham : , : Springer International Publishing : , : Imprint : Springer, , 2018 |
| Descrizione fisica | 1 online resource (207 pages) |
| Disciplina | 530.44 |
| Soggetto topico |
Plasma (Ionized gases)
Probabilities Statistical physics Applied mathematics Engineering mathematics Plasma Physics Probability Theory and Stochastic Processes Applications of Nonlinear Dynamics and Chaos Theory Mathematical and Computational Engineering |
| ISBN | 3-030-04483-1 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Preface -- Introduction -- From Branly Coherer to Chua Memristor, Jean-Marc Ginoux and Thomas Cuff -- Magnetron modes and the chimera states, Victor J. Law and Denis P. Dowling -- The Fokker-Planck Equation and the first exit time problem. A fractional second order approximation, Christos H Skiadas and Charilaos Skiadas -- Anomalous diffusion by the fractional Fokker-Planck equation and Lévy stable processes, Johan Anderson and Sara Moradi -- Analysis of low-frequency instabilities in low-temperature magnetized plasma, Dan-Gheorghe Dimitriu, Maricel Agop -- Theoretical modeling of the interaction between two complex space charge structures in low-temperature plasma, Stefan Irimiciuc, Dan-Gheorghe Dimitriu, Maricel Agop -- Some applications of fractional derivatives in many-particle disordered large systems, Z.Z. Alisultanov, A.M. Agalarov, A.A. Potapov, G.B. Ragimkhanov -- Similarities between dynamics at atomic and cosmological scales, Maricel Agop, Alina Gavrilut¸ and Gabriel Crumpei -- Plasma Perturbations and Cosmic Microwave Background Anisotropy in the Linearly Expanding Milne-like Universe, S.L. Cherkas and V.L. Kalashnikov. |
| Record Nr. | UNINA-9910303443103321 |
| Cham : , : Springer International Publishing : , : Imprint : Springer, , 2018 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Frequency Conversion of Ultrashort Pulses in Extended Laser-Produced Plasmas [[electronic resource] /] / by Rashid A Ganeev
| Frequency Conversion of Ultrashort Pulses in Extended Laser-Produced Plasmas [[electronic resource] /] / by Rashid A Ganeev |
| Autore | Ganeev Rashid A |
| Edizione | [1st ed. 2016.] |
| Pubbl/distr/stampa | Singapore : , : Springer Singapore : , : Imprint : Springer, , 2016 |
| Descrizione fisica | 1 online resource (230 p.) |
| Disciplina | 530 |
| Collana | Springer Series on Atomic, Optical, and Plasma Physics |
| Soggetto topico |
Atoms
Physics Lasers Photonics Optical materials Electronic materials Plasma (Ionized gases) Microwaves Optical engineering Atoms and Molecules in Strong Fields, Laser Matter Interaction Optics, Lasers, Photonics, Optical Devices Optical and Electronic Materials Plasma Physics Microwaves, RF and Optical Engineering |
| ISBN | 981-10-0194-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Preface -- Introduction: Theory and experiment of high-order harmonic generation in narrow and extended media -- 1 HHG in short-length plasmas -- 2 HHG in extended plasmas -- 3 Quasi-phase-matching of harmonics in laser-produced plasmas -- 4 Peculiarities of the HHG in the extended plasmas produced on the surfaces of different materials -- 5 New opportunities of extended plasma induced harmonic generation -- 6 Harmonic characterization using different HHG schemes -- Summary: achievements and perspectives. |
| Record Nr. | UNINA-9910254638003321 |
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Ganeev Rashid A
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| Singapore : , : Springer Singapore : , : Imprint : Springer, , 2016 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Frontiers in Fusion Research II [[electronic resource] ] : Introduction to Modern Tokamak Physics / / by Mitsuru Kikuchi, Masafumi Azumi
| Frontiers in Fusion Research II [[electronic resource] ] : Introduction to Modern Tokamak Physics / / by Mitsuru Kikuchi, Masafumi Azumi |
| Autore | Kikuchi Mitsuru |
| Edizione | [1st ed. 2015.] |
| Pubbl/distr/stampa | Cham : , : Springer International Publishing : , : Imprint : Springer, , 2015 |
| Descrizione fisica | 1 online resource (412 p.) |
| Disciplina | 621.042 |
| Soggetto topico |
Nuclear energy
Nuclear fusion Plasma (Ionized gases) Nuclear Energy Nuclear Fusion Plasma Physics |
| ISBN | 3-319-18905-0 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Steady State Tokamak Reactor -- Plasma Equilibrium in Tokamak -- Advanced Tokamak Regime -- Collisional Transport in Tokamak -- Low Frequency Collective Motions in Tokamak -- Plasma Confinement in Tokamak -- Turbulent Transport in Tokamak -- MHD Stability -- Technology Developments for Fusion Power -- A: Mathematical Basics -- B: Elementary Physics -- C: Elementary Plasmas Physics. |
| Record Nr. | UNINA-9910299611203321 |
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Kikuchi Mitsuru
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| Cham : , : Springer International Publishing : , : Imprint : Springer, , 2015 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Fundamental Aspects of Plasma Chemical Physics [[electronic resource] ] : Kinetics / / by Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni, Annarita Laricchiuta, Savino Longo
| Fundamental Aspects of Plasma Chemical Physics [[electronic resource] ] : Kinetics / / by Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni, Annarita Laricchiuta, Savino Longo |
| Autore | Capitelli Mario |
| Edizione | [1st ed. 2016.] |
| Pubbl/distr/stampa | New York, NY : , : Springer New York : , : Imprint : Springer, , 2016 |
| Descrizione fisica | 1 online resource (330 p.) |
| Disciplina | 530 |
| Collana | Springer Series on Atomic, Optical, and Plasma Physics |
| Soggetto topico |
Plasma (Ionized gases)
Physical chemistry Mathematical physics Mechanics Plasma Physics Physical Chemistry Theoretical, Mathematical and Computational Physics Classical Mechanics |
| ISBN | 1-4419-8185-3 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Electron-molecule cross sections and rates involving rotationally, vibrationally and electronically excited states -- Reactivity and relaxation of vibrationally/rotationally excited molecules with open shell atoms -- Formation of vibrationally and rotationally excited molecules during atom recombination on surfaces -- Collisional-radiative models for atomic plasmas -- Collisional-radiative models for molecular plasmas -- Kinetic and Monte Carlo approaches to solve Boltzmann equation for the electron energy distribution functions -- Non-equilibrium plasma kinetics under discharge and post-discharge conditions: coupling problems for low pressure and atmospheric cold plasmas -- Ion transport under strong fields -- PIC (Particle In Cell ) models for low-pressure plasmas -- Negative ion H- for fusion -- Non equilibrium plasma expansion through nozzles. |
| Record Nr. | UNINA-9910254644403321 |
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Capitelli Mario
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| New York, NY : , : Springer New York : , : Imprint : Springer, , 2016 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Fundamental Aspects of Plasma Chemical Physics [[electronic resource] ] : Transport / / by Mario Capitelli, Domenico Bruno, Annarita Laricchiuta
| Fundamental Aspects of Plasma Chemical Physics [[electronic resource] ] : Transport / / by Mario Capitelli, Domenico Bruno, Annarita Laricchiuta |
| Autore | Capitelli Mario |
| Edizione | [1st ed. 2013.] |
| Pubbl/distr/stampa | New York, NY : , : Springer New York : , : Imprint : Springer, , 2013 |
| Descrizione fisica | 1 online resource (364 p.) |
| Disciplina | 541.0424 |
| Collana | Springer Series on Atomic, Optical, and Plasma Physics |
| Soggetto topico |
Plasma (Ionized gases)
Physical chemistry Statistical physics Dynamical systems Thermodynamics Mathematical physics Plasma Physics Physical Chemistry Complex Systems Theoretical, Mathematical and Computational Physics Statistical Physics and Dynamical Systems |
| ISBN | 1-4419-8172-1 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | Transport Processes in Dilute Polyatomic Gases -- Transport Coefficient Evaluation -- Transport Cross Sections: Classical and Quantum Approaches -- Resonant Charge Exchange in Ion-Parent– Atom Collisions -- Collision Integrals for Interactions Involving Excited Species -- Vibrational Excitation and Transport Properties of Reacting Gases -- Electronically Excited States and Transport Properties of Thermal Plasmas -- Transport Properties of Multi-Temperature Plasmas -- Transport Properties in the Presence of Magnetic Fields -- Some Problems in the Calculation of Transport Properties -- Transport Properties of High Temperature Planetary Atmospheres. |
| Record Nr. | UNINA-9910437982703321 |
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Capitelli Mario
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| New York, NY : , : Springer New York : , : Imprint : Springer, , 2013 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Fundamentals of Astrophysical Fluid Dynamics [[electronic resource] ] : Hydrodynamics, Magnetohydrodynamics, and Radiation Hydrodynamics / / by Shoji Kato, Jun Fukue
| Fundamentals of Astrophysical Fluid Dynamics [[electronic resource] ] : Hydrodynamics, Magnetohydrodynamics, and Radiation Hydrodynamics / / by Shoji Kato, Jun Fukue |
| Autore | Kato Shoji |
| Edizione | [1st ed. 2020.] |
| Pubbl/distr/stampa | Singapore : , : Springer Singapore : , : Imprint : Springer, , 2020 |
| Descrizione fisica | 1 online resource (xxiv, 625 pages) : illustrations |
| Disciplina | 629.41 |
| Collana | Astronomy and Astrophysics Library |
| Soggetto topico |
Astrophysics
Fluids Plasma (Ionized gases) Gravitation Cosmology Space sciences Astrophysics and Astroparticles Fluid- and Aerodynamics Plasma Physics Classical and Quantum Gravitation, Relativity Theory Space Sciences (including Extraterrestrial Physics, Space Exploration and Astronautics) |
| ISBN | 981-15-4174-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | 1 Introduction -- Part I Hydrodynamical Phenomena in Astrophysical Objects -- 2 Basic Equations for Hydrodynamics -- 3 Astrophysical Fluid Flows -- 4 Wave Phenomena in Astrophysical Objects -- 5 Convection and Related Topics -- 6 Dynamical Instability and Dynamical Excitation of Oscillations -- 7 Instabilities due to Dissipative Processes I (Secular Instability) -- 8 Overstability due to Dissipative Processes II: Excitation of Oscillations -- 9 General Relativistic Hydrodynamics -- Part II Magnetohydrodynamical Phenomena in Astrophysical Objects -- 10 Derivation of Magnetohydrodynamical Equations from Boltzmann Equation -- 11 MHD Equations and Basic Characteristics of Magnetic Fields -- 12 Astrophysical MHD Flows -- 13 Waves and Shocks in Magnetohydrodynamical Fluids -- 14 Astrophysical Dynamo -- 15 General Stability Theorem for MHD Systems -- 16 Instabilities Related to Magnetic Fields -- 17 Important Non-Ideal MHD Processes -- 18 Relativistic Magnetohydrodynamics -- Part III Astrophysical Radiation Hydrodynamics -- 19 Basic Concepts of Radiative Fluids -- 20 Basic Equations for Radiative Transfer -- 21 Basic Equations for Radiation Hydrodynamics -- 22 Astrophysical RHD Flows -- 23 Wave and Instability in Radiative Fluids -- 24 Relativistic Radiative Transfer -- 25 Relativistic Radiation Hydrodynamics -- 26 General Relativistic Radiation Hydrodynamics. |
| Record Nr. | UNINA-9910410001303321 |
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Kato Shoji
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| Singapore : , : Springer Singapore : , : Imprint : Springer, , 2020 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. Federico II | ||
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Fundamentals of Astrophysical Fluid Dynamics [[electronic resource] ] : Hydrodynamics, Magnetohydrodynamics, and Radiation Hydrodynamics / / by Shoji Kato, Jun Fukue
| Fundamentals of Astrophysical Fluid Dynamics [[electronic resource] ] : Hydrodynamics, Magnetohydrodynamics, and Radiation Hydrodynamics / / by Shoji Kato, Jun Fukue |
| Autore | Kato Shoji |
| Edizione | [1st ed. 2020.] |
| Pubbl/distr/stampa | Singapore : , : Springer Singapore : , : Imprint : Springer, , 2020 |
| Descrizione fisica | 1 online resource (xxiv, 625 pages) : illustrations |
| Disciplina | 629.41 |
| Collana | Astronomy and Astrophysics Library |
| Soggetto topico |
Astrophysics
Fluids Plasma (Ionized gases) Gravitation Cosmology Space sciences Astrophysics and Astroparticles Fluid- and Aerodynamics Plasma Physics Classical and Quantum Gravitation, Relativity Theory Space Sciences (including Extraterrestrial Physics, Space Exploration and Astronautics) |
| ISBN | 981-15-4174-4 |
| Formato | Materiale a stampa |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione | eng |
| Nota di contenuto | 1 Introduction -- Part I Hydrodynamical Phenomena in Astrophysical Objects -- 2 Basic Equations for Hydrodynamics -- 3 Astrophysical Fluid Flows -- 4 Wave Phenomena in Astrophysical Objects -- 5 Convection and Related Topics -- 6 Dynamical Instability and Dynamical Excitation of Oscillations -- 7 Instabilities due to Dissipative Processes I (Secular Instability) -- 8 Overstability due to Dissipative Processes II: Excitation of Oscillations -- 9 General Relativistic Hydrodynamics -- Part II Magnetohydrodynamical Phenomena in Astrophysical Objects -- 10 Derivation of Magnetohydrodynamical Equations from Boltzmann Equation -- 11 MHD Equations and Basic Characteristics of Magnetic Fields -- 12 Astrophysical MHD Flows -- 13 Waves and Shocks in Magnetohydrodynamical Fluids -- 14 Astrophysical Dynamo -- 15 General Stability Theorem for MHD Systems -- 16 Instabilities Related to Magnetic Fields -- 17 Important Non-Ideal MHD Processes -- 18 Relativistic Magnetohydrodynamics -- Part III Astrophysical Radiation Hydrodynamics -- 19 Basic Concepts of Radiative Fluids -- 20 Basic Equations for Radiative Transfer -- 21 Basic Equations for Radiation Hydrodynamics -- 22 Astrophysical RHD Flows -- 23 Wave and Instability in Radiative Fluids -- 24 Relativistic Radiative Transfer -- 25 Relativistic Radiation Hydrodynamics -- 26 General Relativistic Radiation Hydrodynamics. |
| Record Nr. | UNISA-996418441103316 |
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Kato Shoji
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| Singapore : , : Springer Singapore : , : Imprint : Springer, , 2020 | ||
| Materiale a stampa | ||
| Lo trovi qui: Univ. di Salerno | ||
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