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Digest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan



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Titolo: Digest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan Visualizza cluster
Pubblicazione: [Place of publication not identified], : Japan Society of Applied Physics, 2007
Disciplina: 620/.5
Soggetto topico: Nanotechnology
Microelectronics
Microlithography
Electrical & Computer Engineering
Engineering & Applied Sciences
Electrical Engineering
Note generali: Bibliographic Level Mode of Issuance: Monograph
Titolo autorizzato: Digest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan  Visualizza cluster
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910872572503321
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