Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / / Warren K. Gladden, Stephen R. Slaughter, Walter M. Duncan, Aslan Baghdadi
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| Autore: |
Gladden Warren K
|
| Titolo: |
Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides / / Warren K. Gladden, Stephen R. Slaughter, Walter M. Duncan, Aslan Baghdadi
|
| Pubblicazione: | Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1988 |
| Descrizione fisica: | 1 online resource |
| Altri autori: |
BaghdadiA
DuncanWalter M
GladdenWarren K
SlaughterStephen R
|
| Note generali: | 1988. |
| Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. | |
| Title from PDF title page. | |
| Nota di bibliografia: | Includes bibliographical references. |
| Titolo autorizzato: | Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910711193003321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |