Handbook of laser micro- and nano-engineering / / edited by Koji Sugioka

• Pubblicazione: Cham, Switzerland : , : Springer, , [2021]; ©2021
• Descrizione fisica: 1 online resource (2085 pages)
• Disciplina: 621.366
• Soggetto topico: Nanostructured materials
• Persona (resp. second.): SugiokaKōji
• Nota di contenuto: Intro -- Foreword -- Preface -- Contents -- About the Editor -- Section Editors -- Contributors -- Part I: Fundamentals of Laser-Matter Interaction -- 1 Laser Coupling and Relaxation of the Absorbed Energy: Metals, Semiconductors, and Dielectrics -- Introduction -- Phenomenological Description of Ultrashort-Pulse Excitation -- Light-Matter Interaction -- Optical Excitation of Metals: The Need for Ultrashort Pulses -- Optical Excitation of Band-Gap Materials: Linear Versus Nonlinear Absorption -- Material Response -- Electromagnetic Fields in Matter -- Experimental Observables Related to Ablation -- Scaling Laws - Part I: Diameter-Squared (D2) Plots -- Scaling Laws - Part II: Depth Versus Fluence -- Ultrashort-Pulse Excitation of Metals -- The Two-Temperature Model -- Thermophysical Material Parameters for Metals -- Optical Material Parameters for Metals -- Examples of Numerical-Modeling Results for Metals -- Ablation Criterion for Metals -- Analytical Models Revisited: A High-Fluence Scaling Law for Metals -- Measuring Ablation Thresholds and Low-Fluence Behavior for Metals -- Single- or Multi-Shot Irradiation: Incubation Effects in Metals -- High-Fluence Ablation Rates for Metals -- Nonthermal Ablation of Metals: Signatures of Mechanical Effects -- Bandgap Materials -- Semiconductors -- Strong-Field Excitation: Keldysh´ Model -- Excitation of Dielectric Materials: The MRE Model -- Ablation Rates of Dielectrics - Experiments and Modeling -- Incubation Effects in Dielectrics -- Conclusion -- Cross-References -- References -- 2 Laser-Induced Non-thermal Processes -- Introduction -- Electron-Electron Scattering -- Non-Thermal Melting -- Hot Electron Pressure -- Nonequilibrium Thermionic Emission -- Emission into Fluids -- Coulomb Explosion -- Summary -- References. ; 3 Laser-Induced Thermal Processes: Heat Transfer, Generation of Stresses, Melting and Solidification, Vaporization, and Phase ... -- Introduction -- Laser Energy Deposition and Redistribution -- Peculiarity of Energy Redistribution in Two-Temperature State -- Contribution of Phonon Thermal Conductivity in Metals -- Effect of Heat Transfer Dimensionality -- Laser-Induced Stresses and Stress Waves -- Generation of Laser Induced Stresses -- Photomechanical Spallation -- Stress Induced Generation of Crystal Defects -- Acoustic Activation of Atomic Level Processes -- Laser-Induced Melting and Resolidification -- Mechanisms and Timescales of Melting -- Heterogeneous Melting -- Homogeneous Melting -- Homogeneous Versus Heterogeneous Melting -- Rapid Solidification and Implications on Surface Microstructure and Morphology -- Liquid-Vapor Transformations -- Normal Vaporization -- Laser Interaction with the Laser Ablation Plume -- Knudsen Layer -- Back Flux to the Laser Vaporizing Surface -- Normal Boiling -- Phase Explosion or Explosive Boiling -- Nanoparticle Formation by Pulsed Laser Ablation -- Concluding Remarks -- Cross-References -- References -- 4 Laser Interactions with Organic/Polymer Materials -- Introduction -- Laser Ablation of Polymers -- UV Laser Ablation of Polymers -- IR Laser Ablation of Polymers -- Laser Ablation of Polymers with Ultrashort Laser Pulses -- Laser Swelling of Polymer Films -- Nanoswelling -- Laser Patterning of Polymer Surfaces -- Direct Laser Interference Patterning -- Laser-Induced Periodic Surface Structures (LIPSS) -- Colloidal Particle Lens Arrays -- Laser Foaming -- Laser-Induced Modifications Based on Chemical Transformations -- Laser Lithography -- Decomposition of Precursor Films -- Photo-Induced Nanocomposites -- 3D Photopolymerization -- Physico-Chemical Modifications Induced by Laser Irradiation. ; Applications of Polymers Modified by Laser Irradiation -- Laser Cleaning -- 3D Optical Data Storage -- Fabrication of Thin Films -- Pulsed Laser Deposition of Organic Materials -- Matrix-Assisted Pulsed Laser Evaporation of Organic Materials -- Laser-Induced Forward Transfer of Organic Materials -- Conclusions -- References -- 5 Microstructure Modification: Generation of Crystal Defects and Phase Transformations -- Introduction -- Energy Transfer in the Interaction of Femtosecond Laser Pulses with Materials -- Laser-Induced Crystallographic Defect Creation in Metals -- Phase Transformation in Metals and Alloys -- Solid-State Transformations in Metals and Alloys -- Melting and Solidification -- Electronic Effects in Laser Melting of Metals -- Thermal Melting of Metals -- Microstructure of the Solidified Materials -- Phase Transformations in Semiconductors -- Introduction -- Phase Transformations of Silicon -- Melting and Solidification -- Solid-State Transformations of Silicon -- Phase Transformations in GaAs and Other III-V Semiconductors -- Transformations in Phase-Change Materials -- Phase Transformations in Ceramic Materials -- Laser-Induced Defects in Dielectric Materials -- Laser Transformations in Sapphire and Alumina -- Transformation of SiC -- Phase Transformations of Carbon -- Laser Transformations of Graphite -- Laser Transformations of Diamond -- Transformations of Graphite and Amorphous Carbon -- Phase Transformations Accompanying LIPSS Formation -- Laser-Induced Transformations in Biological Hard Tissues -- Summary -- References -- Part II: Laser Systems -- 6 CO2 Lasers -- Introduction -- Required Nature of CO2 Laser for Micro- and Nano-fabrications -- Focusing -- Pulse Duration -- Output Energy -- Pulse Repetition Rate -- Gas Flowing -- Beam Delivery -- Switching -- Longitudinal Mode -- Wavelength Selection. ; Short-Pulse Longitudinally Excited CO2 Laser -- Development of Rapid Discharge Gas Lasers -- Longitudinally Excited Pulsed CO2 Laser -- Generation of Laser Pulse with a Pulse Width of About 100 ns Without Pulse Tail -- Recent Progress -- Harmonic Generation -- Switchless Discharge System -- CO2 Laser for EUV Source -- Applications -- Ablation of Glass Surfaces -- Dental Tooth Ablation -- Laser Drilling of Printed Circuit Board -- Repair of Cultural Assets -- Target Fabrication for Plasma Experiment -- Conclusions -- References -- 7 Fiber Lasers -- Introduction -- Current Status of Continuous Wave (CW) and Short Pulsed Fiber Lasers -- Ultrafast Mode-Locked Fiber Laser Oscillators -- High-Power Ultrafast Fiber Laser Amplifiers -- Single-Crystal Fiber Amplifiers -- MHz~GHz~THz Repetition Rate Burst-Mode Fiber Lasers for Laser Processing -- Radially Polarized Fiber Lasers and Bessel Beam for Processing -- Flexible Ultrafast Laser Beam Delivery and Nonlinear Compression -- High Repetition Rate Fiber Lasers for High Harmonic Generation -- Conclusion -- Cross-References -- References -- 8 Ultrashort Pulse Lasers -- Introduction -- Active and Passive Mode-Locking -- Propagation Properties of Ultrashort Pulse Laser -- Negative Dispersion Components -- SESAM Passive Mode-Locked Solid-State Laser -- InnoSlab Amplifier for Ultrashort Pulse Laser -- Summary -- References -- 9 Excimer Lasers for Lithography and Annealing -- Introduction -- Excimer Laser Base Technology for Lithography Application -- Wavelength and Bandwidth Stability and Cavity -- Discharge Chamber -- Pulsed Power Module -- Twin Chamber Technology -- Injection Lock Technology -- Progress of DUV Lithography -- Exposure Tool -- Practical Excimer Lasers for Lithography -- Overview -- KrF Excimer Laser (KLES-G7, 600 Hz, 7.5 W, 1996) (Mizoguchi et al. 1996b). ; Solid State Pulsed Power Circuit (Yanase et al. 1995) -- Pulse Energy Stability -- Spectral Stability -- Maintenance -- KrF Excimer Laser (ELS-4000, 500 Hz, 5 W, 1998) (Cymer 1991, 1992) -- KrF Excimer Laser (G40K:4000 Hz, 40 W, 2001) (Matsunaga et al. 2001) -- Improvement of Higher Repetition Rate: Gas Velocity Between Electrodes -- Improvement of dV/dt -- Improved Ultra-Narrowing Technology-Pulse Stretching -- F2 Injection Lock Laser (4000 Hz,40 W,0.4 pm, 2000) (Mizoguchi et al. 2003) -- Outline of Project -- System Configuration -- Amplifier Performance -- Oscillator Laser Performance -- System Performance -- Energy Performance -- Spectral Performance -- Performance Summary -- ArF Excimer Laser (XLA-100, 4000 Hz, 40 W, 2003) (Cymer 2003) -- ArF Excimer Lasers (GT Series, 40 W-120 W,2004-) (Miyamoto et al. 2018) -- GT40A (Kakizaki et al. 2004) -- Design Concept of ``Giga Twin´´ -- Efficiency -- Spectral Bandwidth -- Spectral Stability at High Repetition Rate Operation -- Power Stability at High Repetition Rate Operation -- GT60A (Mizoguchi et al. 2006) -- Common Platform Design -- Chamber Improvement -- Spectral Stability -- Energy Stability -- Wavelength Stability -- Advanced Bandwidth Control Module -- Excimer Lasers for Annealing -- Excimer Laser Base Technology for Annealing Application -- Excimer Laser Systems for Annealing Application -- The Twin-Vyper Approach -- The Tri-Vyper Systems as the Longest Line Annealing Units -- Summary -- References -- 10 EUV Sources -- Introduction -- EUV Lithography and Light Source -- History of EUV Lithography and EUV Source Development (Okazaki 2012) -- Key Technologies of EUV LPP Light Source -- Basic Issue of EUV Light Source -- System Concept -- Tin Droplet Generation -- Pre-Pulse Technology -- Driver CO2 Laser System -- Debris Mitigation -- Simulation of EUV Source -- Plasma Simulation Codes. ; ETS EUV Source of Gigaphoton.
• Titolo autorizzato: Handbook of Laser Micro- and Nano-Engineering
• ISBN: 3-030-63647-X
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Lingua di pubblicazione: Inglese
• Record Nr.: 996466847503316
• Lo trovi qui: Univ. di Salerno