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[null,"1.","Record Nr.",null,"UNINA9911019632803321"]
[null,null,"Titolo",null,"Nano-lithography / / edited by Stefan Landis"]
[null,null,"Pubbl/distr/stampa",null,"London, : ISTE"]
[{"$nulls":4},"Hoboken, N.J., : Wiley, 2011"]
[null,null,"ISBN",null,"9781118621707"]
[{"$nulls":4},"1118621700"]
[{"$nulls":4},"9781118622582"]
[{"$nulls":4},"1118622588"]
[{"$nulls":4},"9781299315587"]
[{"$nulls":4},"1299315585"]
[{"$nulls":4},"9781118621622"]
[{"$nulls":4},"111862162X"]
[null,null,"Edizione",null,"[1st edition]"]
[null,null,"Descrizione fisica",null,"1 online resource (353 p.)"]
[null,null,"Collana",null,"ISTE"]
[null,null,"Disciplina",null,"621.3815/31"]
[null,null,"Soggetti",null,"Nanolithography"]
[null,null,"Lingua di pubblicazione",null,"Inglese"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Note generali","\"Adapted and updated from La nanolithographie published 2010 in France by Hermes Science/Lavoisier\"--t.p. verso."]
[null,null,null,"Nota di bibliografia","Includes bibliographical references and index."]
[null,null,"Nota di contenuto",null,"Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography."]
[null,null,null,"Sommario/riassunto","Lithography is an extremely complex tool - based on the concept of \"imprinting\" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams - in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics,"]